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Thermal mass flow meter

About: Thermal mass flow meter is a research topic. Over the lifetime, 1759 publications have been published within this topic receiving 21878 citations.


Papers
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30 Nov 1989

28 citations

Journal ArticleDOI
TL;DR: In this paper, the important systematic influences for an ultrasonic flow meter (UFM) for feed water flow are identified to decide which characterisations have to be carried out in addition to a typical baseline calibration with water at 20 °C.

28 citations

Proceedings ArticleDOI
06 Jun 2004
TL;DR: In this paper, a microfluidic system for measuring the mass flow rate, dose, chemical concentration, fluid density, specific gravity and temperature has been developed for both mass flow measurements and density sensing.
Abstract: A new microfluidic system for measuring the mass flow rate, dose, chemical concentration, fluid density, specific gravity and temperature has been developed. Vacuum packaged, resonating silicon microtubes are employed to form both a Coriolis mass flow and density sensor. The micro Coriolis mass flow sensor has 10 times the resolution of the best commercially available macro Coriolis mass flow sensors. An onchip temperature sensor (RTD) has been added to the microchip, enabling accurate fluid temperature monitoring. At constant temperature the density resolution/or output stability approaches 1 over 1 million (6 digits) in the new system. Also a new method of chip-level gettering was developed to achieve the milliTorr pressures needed for adequate resonator signal quality for the vacuum packaged microsensors. Applications for both mass flow measurements and density sensing are discussed.

28 citations

Journal ArticleDOI
TL;DR: In this article, the authors describe individual influences of gas flow velocity and thermal conductivity on temperature amplitude and phase measurements from a dynamic MEMS thermal flow sensor that employs AC heating at 200 Hz.
Abstract: Through finite element modeling and experiments, we describe individual influences of gas flow velocity (v) and thermal conductivity (λ) on temperature amplitude and phase measurements from a dynamic MEMS thermal flow sensor that employs AC heating at 200 Hz. We further describe the relationships among the temperature phase, time-of-flight, and time-of-diffusion proposing a new boundary layer definition based on the existing flow and thermal boundary layer theories. The sensor has five primary thermistors made of amorphous germanium for high sensitivity. Four of these are symmetrically distributed around four central heater elements on a thermally isolating diaphragm where the fifth is in the center. Simulations and experimental results show that phase shifts (time lags) of temperature between thermistors primarily depend on λ, and negligibly on v below a velocity limit. Simulation results also suggest that the influences of density (ρ) and specific heat capacity (cP) on these phase shifts are relatively small or even negligible. Thus, λ can be accurately determined independent of the flow velocity for gases of similar ρ · cP product, up to 1 m/s under the set flow boundary conditions. Hence, simultaneous determination of thermal conductivity and flow velocity is expected to be feasible with this sensor under these circumstances, which, in turn, allows medium-independent flow sensing for a such selected set of gases. Experimental results show that the measurement resolution and maximum inaccuracy of λ within the prescribed flow conditions are approximately equal to 2.445% and 3.18 + 4.20% (nonlinearity + velocity dependence) of the actual thermal conductivity, respectively.

28 citations

Patent
15 Oct 2007
TL;DR: In this article, a vibratory flow meter (5) for determining a derived fluid temperature derivative of a flow material is presented. But the authors do not specify the type of flow material.
Abstract: A vibratory flow meter (5) for determining a derived fluid temperature Tf-derive of a flow material is provided according to the invention. The vibratory flow meter (5) includes a flow meter assembly (10) including one or more flow conduits (103), a meter temperature sensor (204) configured to measure a meter temperature Tm, an ambient temperature sensor (208) for measuring an ambient temperature Ta, and meter electronics (20) coupled to the meter temperature sensor (204) and to the ambient temperature sensor (208). The meter electronics (20) is configured to receive the meter temperature Tm and the ambient temperature Ta and determine the derived fluid temperature Tf-deriv of the flow material in the vibratory flow meter (5) using the meter temperature Tm and the ambient temperature Ta.

28 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202312
202226
20212
20208
20194
201811