Topic
Thermal mass flow meter
About: Thermal mass flow meter is a research topic. Over the lifetime, 1759 publications have been published within this topic receiving 21878 citations.
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Patent•
12 Jun 1974
TL;DR: In this article, a fluid flow meter with two independently counter rotating turbine impellers is described, in which fluid characteristics and/or upstream flow disturbances cause minimal variations in volume flow rate measurements by the meter as a result of fluid dynamic interaction between the impellers.
Abstract: A fluid flow meter with two independantly counter rotating turbine impellers is disclosed in which fluid characteristics and/or upstream flow disturbances cause minimal variations in volume flow rate measurements by the meter as a result of fluidynamic interaction between the impellers The angular velocities of each of the impellers are sensed in a conventional manner after which the velocity signals are added to indicate a total volume thruput, and/or rate of flow, and optionally compared to indicate an occurance of mechanical or electronic degradation
27 citations
TL;DR: In this article, a compact anemometer based on integrated flow sensors is presented, which exploits a recently proposed approach, by which the pressure induced on the lateral surface of a cylinder exposed to the wind is converted into two air flow rates exhibiting sinusoidal dependence on the wind direction.
27 citations
Patent•
25 Jul 2008
TL;DR: In fluid flow measurement applications, apparatus and associated systems, computer program products, and methods may include a positive displacement fluid flow meter having an actuator to control fluid flow through the meter, and further having two or more rotating members with substantially parallel axes that rotate in response to the actuator and to fluid flow being measured through a meter as mentioned in this paper.
Abstract: In fluid flow measurement applications, apparatus and associated systems, computer program products, and methods may include a positive displacement fluid flow meter having an actuator to control fluid flow through the meter, and further having two or more rotating members with substantially parallel axes that rotate in response to the actuator and to fluid flow through the meter. In various implementations, the actuator may promote and/or retard a fluid flow being measured through the meter. In some examples, the fluid flow meter may operate as a pump to controllably increase a line pressure, controllably regulate a fluid flow rate by opposing rotation of the rotating members, substantially stop a fluid flow, and/or reverse a base fluid flow direction. In an illustrative example, the meter may operate to accurately monitor and control fluid flow (e.g., fluid pressure, velocity, and/or volume) before, during, and/or after a line break.
27 citations
Patent•
21 Aug 2001
TL;DR: In this paper, a flow meter body includes a flow restrictor interposed in a passage and plural mass flow sensors which sense overlapping full scale fluid mass flow ranges across the flow restrictors to increase the overall range of flow rates sensed by the meter.
Abstract: Fluid mass flow meters, particularly for measuring a wide range of relatively low flow rates of gas used in semiconductor fabrication processes include a body adapted to be interposed in a purge gas line leading to or from a mass flow controller or in a process gas line with the mass flow controller. The flow meter body includes a flow restrictor interposed in a passage and plural mass flow sensors which sense overlapping full scale fluid mass flow ranges across the flow restrictor to increase the overall range of fluid mass flow rates sensed by the meter. The flow meter body may include series or parallel arranged flow restrictors, a second set of mass flow sensors, and valving to cause a set of mass flow sensors to sense fluid mass flow rates across one or both of the flow restrictors. Embodiments of the flow meter include a pressure transducer mass flow sensor and conduits arranged with additional flow restrictors therein to selectively vary the full scale measurement range of the mass flow sensor.
27 citations
TL;DR: In this article, a thermal mass bypass flow meter is described, with details of its design, principle of operation, calibration, and testing of effects of ambient temperature and orientation on its performance.
27 citations