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Thermal mass flow meter

About: Thermal mass flow meter is a research topic. Over the lifetime, 1759 publications have been published within this topic receiving 21878 citations.


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Patent
James L. Sprague1
22 Jul 2005
TL;DR: In this paper, a program product to measure fluid flow characteristics in a pipeline is provided, which includes instructions for a fluid characteristic determiner to perform the operations of processing measured and sensed signals to produce an output of a volumetric flow rate, a flowing fluid density, and a mass flow rate.
Abstract: Program product to measure fluid flow characteristics in a pipeline is provided. A vortex-shedding body is positioned within the pipeline to form vortices. A vortex meter can include a vortex frequency sensor to measure the frequency of the vortices to determine the volumetric flow rate. A differential pressure meter positioned adjacent the vortex-shedding body can produce a differential pressure meter flow rate signal indicative of the density of fluid when flowing through the pipeline. A thermal flow meter positioned adjacent the vortex-shedding body can produce a mass flow rate signal indicative of the mass flow rate of fluid when flowing through the pipeline. The program product can include instructions for a fluid characteristic determiner to perform the operations of processing measured and sensed signals to produce an output of a volumetric flow rate, a flowing fluid density, and a mass flow rate to be displayed on a fluid characteristic display.

23 citations

Patent
18 Nov 1991
TL;DR: In this article, the authors present a method and apparatus for monitoring in real time the mass and energy flow rate of a gas through a pipeline, where a linear flow meter is used to measure the volumetric flow of pipeline gas through the pipeline.
Abstract: The present invention is a method and apparatus for monitoring in real time the mass and energy flow rate of a gas through a pipeline. The invention determines the mass flow ratio of a pipeline gas flowing through a pipeline compared to sample gas tapped from the pipeline line when the volumetric flow of pipeline gas through the pipeline is measured by a linear flow meter. Sample gas tapped from the pipeline is flowed to a chamber having a section with a fixed volume until the pressure in the chamber section is substantially equal to the pipeline gas pressure. The sample gas is maintained at substantially the same temperature as the gas in the pipeline while the sample gas is in the chamber section. A timer measures the time interval for the sample gas to flow from the chamber section at a selected rate for a calculated pressure drop the selected rate being controlled by a flow controller. The mass flow ratio is computed using the measured time interval and a signal from the linear flow meter. The energy flow rate of the pipeline gas is determined by measuring the energy flow rate of the sample gas and relating that value to the mass flow ratio of the pipeline gas compared to the sample gas.

23 citations

Patent
30 Sep 2003
TL;DR: In this article, apparatuses, methods and systems to monitor the performance of one or more mass flow controllers that supply gases to deposition, etching, and other manufacturing processes are described.
Abstract: Described herein are apparatuses, methods and systems to monitor the performance of one or more mass flow controllers that supply gases to deposition, etching, and other manufacturing processes. A bypass loop is provided in fluid connection from either the process line or the vent line. In the bypass loop is a flow detector, such as a digitized mass flow controller. The flow detector takes one or more measurements of flow of gas from a mass flow controller, and data from such one or more measurements is used to provide information about the accuracy and/or precision of the mass flow controller. Also disclosed are ways to correct for back pressure or back vacuum in the process line.

23 citations

Patent
01 Dec 1983
TL;DR: In this article, the thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart.
Abstract: Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart In another embodiment, thin carrier sheet portions of a wafer bearing the thermal fluid flow sensors of the airfoil or grid type are supported by surrounding frame portions of the wafer The wafer is diced to separate the individual sensing chips The respective chips are mounted across respective fluid flow ducts For the airfoil type sensor, portions of the frame are broken away for undisturbed flow over the thin carrier and sensor In one thermal flow sensor configuration, a flow heater is disposed in between first and second thermal flow sensors in heat exchanging relation therewith A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow

23 citations

Patent
21 Aug 2001
TL;DR: In this article, a differential pressure flow meter is used to determine gas and liquid phase mass flow rates of the high void fraction multiphase flow and a well control system implements a correlating adjustment action respecting the multi-phase flow.
Abstract: Oil field management systems and methods for managing operation of one or more wells producing a high void fraction multiphase flow. The system includes a differential pressure flow meter which samples pressure readings at various points of interest throughout the system and uses pressure differentials derived from the pressure readings to determine gas and liquid phase mass flow rates of the high void fraction multiphase flow. One or both of the gas and liquid phase mass flow rates are then compared with predetermined criteria. In the event such mass flow rates satisfy the predetermined criteria, a well control system implements a correlating adjustment action respecting the multiphase flow. In this way, various parameters regarding the high void fraction multiphase flow are used as control inputs to the well control system and thus facilitate management of well operations.

23 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202312
202226
20212
20208
20194
201811