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Thin-film transistor

About: Thin-film transistor is a research topic. Over the lifetime, 48425 publications have been published within this topic receiving 680879 citations. The topic is also known as: TFT.


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Patent
01 Sep 2005
TL;DR: In this paper, a thin-film transistor is defined, which includes a semiconductor thin film (8), a gate insulating film (7) formed on one surface of the semiconductor, a gate electrode (6) formed to be opposite to the SINR through the gate insulator, and a source electrode (15) and a drain electrode (16) electrically connected to the source and drain electrodes through the contact hole.
Abstract: A thin film transistor of the present invention includes a semiconductor thin film (8); a gate insulating film (7) formed on one surface of the semiconductor thin film (8); a gate electrode (6) formed to be opposite to the semiconductor thin film (8) through the gate insulating film (7); a source electrode (15) and a drain electrode (16) electrically connected to the semiconductor thin film (8); a source region; a drain region; and a channel region. The thin film transistor further includes an insulating film (9) formed on a peripheral portion corresponding to at least the source region and the drain region of the semiconductor thin film (8), and having a contact hole (10, 11) through which at least a part of each of the source region and the drain region is exposed wherein the source electrode (15) and the drain electrode (16) are connected to the semiconductor thin film (8) through the contact hole (10, 11).

1,069 citations

Patent
Kazufumi Ogawa1
15 Nov 2001
TL;DR: By imparting conductivity to specified regions of a semiconductor material film 4 formed over a substrate 2, the semiconductor materials film 4, in addition to being processed into channel portions (active layers) 4 a, source portions 4 b, and drain portions 4 c of TFTs, is processed into conductive elements containing pixel electrodes 10 connected to the drain portion 4 c.
Abstract: By imparting conductivity to specified regions of a semiconductor material film 4 formed over a substrate 2 , the semiconductor material film 4 , in addition to being processed into channel portions (active layers) 4 a , source portions 4 b , and drain portions 4 c of TFTs, is processed into conductive elements containing pixel electrodes 10 connected to the drain portions 4 c . Regions composed of an intrinsic semiconductor to which impurities have not been added serve as the active layers (channel regions) of the TFTs and regions to which impurities have been added serve as conductive elements. When transparent electrodes are formed, an oxide semiconductor is used.

1,067 citations

Patent
22 Jun 2006
TL;DR: In this article, a method of making a thin film transistor comprises (a) depositing a dispersion comprising semiconducting metal oxide nanoparticles onto a substrate, (b) sintering the nanoparticles to form a semiconductor layer, and (c) optionally subjecting the resulting semiconductor layers to post-deposition processing.
Abstract: A method of making a thin film transistor comprises (a) solution depositing a dispersion comprising semiconducting metal oxide nanoparticles onto a substrate, (b) sintering the nanoparticles to form a semiconductor layer, and (c) optionally subjecting the resulting semiconductor layer to post-deposition processing.

1,063 citations

Patent
Ryo Hayashi1, Masafumi Sano1, Katsumi Abe1, Hideya Kumomi1, Kojiro Nishi1 
19 Oct 2006
TL;DR: In this article, a light-shielding structure for the active layer is provided as a light shielding structure, for example, on the bottom face of the substrate, where an oxide has a transmittance of 70% or more in the wavelength range of 400 to 800 nm.
Abstract: A field-effect transistor includes a substrate, a source electrode, a drain electrode, a gate electrode, a gate-insulating film, and an active layer. The active layer contains an oxide having a transmittance of 70% or more in the wavelength range of 400 to 800 nm. A light-shielding member is provided as a light-shielding structure for the active layer, for example, on the bottom face of the substrate.

1,062 citations

Patent
Hisato Yabuta1
29 Aug 2006
TL;DR: In this paper, a thin film transistor comprising a channel layer comprised of an oxide semiconductor containing In, M, Zn, and O, M including at least one selected from the group consisting of Ga, Al, and Fe.
Abstract: Provided is a thin film transistor comprising a channel layer comprised of an oxide semiconductor containing In, M, Zn, and O, M including at least one selected from the group consisting of Ga, Al, and Fe. The channel layer is covered with a protective film.

1,058 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
2023341
2022918
2021640
20201,333
20192,015
20182,080