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Vacuum deposition

About: Vacuum deposition is a research topic. Over the lifetime, 6348 publications have been published within this topic receiving 102064 citations.


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Book ChapterDOI
01 Jan 1994
TL;DR: Pulsed laser deposition of high-temperature superconducting thin films for active and passive device applications is discussed in this article, with a focus on the commercial scale-up of Pulsed Laser Deposition.
Abstract: Partial table of contents: History and Fundamentals of Pulsed Laser Deposition (J. Cheung). Diagnostics and Characteristics of Laser--Produced Plasmas (D. Geohegan). Particulates Generated by Pulsed Laser Ablation (L.--C. Chen). Angular Distribution of Ablated Material (K. Saenger). Film Nucleation and Film Growth in Pulsed Laser Deposition of Ceramics (J. Horwitz & J. Sprague). Processes Characteristics and Film Properties in Pulsed Laser Plasma Deposition (S. Metev). Commercial Scale--Up of Pulsed Laser Deposition (J. Greer). Pulsed Laser Deposition: Future Trends (T. Venkatesan). Comparison of Vacuum Deposition Techniques (G. Hubler). Pulsed Laser Deposition of High--Temperature Superconducting Thin Films for Active and Passive Device Applications (R. Muenchausen & X. Wu). Pulsed Laser Deposition of Metals (J. Kools). Appendix. References. Index.

3,228 citations

Journal ArticleDOI
TL;DR: In this paper, the first successful preparation of thin films of Y-Ba-Cu-O superconductors using pulsed excimer laser evaporation of a single bulk material target in vacuum was reported.
Abstract: We report the first successful preparation of thin films of Y‐Ba‐Cu‐O superconductors using pulsed excimer laser evaporation of a single bulk material target in vacuum. Rutherford backscattering spectrometry showed the composition of these films to be close to that of the bulk material. Growth rates were typically 0.1 nm per laser shot. After an annealing treatment in oxygen the films exhibited superconductivity with an onset at 95 K and zero resistance at 85 and 75 K on SrTiO3 and Al2O3 substrates, respectively. This new deposition method is relatively simple, very versatile, and does not require the use of ultrahigh vacuum techniques.

1,122 citations

Journal ArticleDOI
TL;DR: Vacuum deposition of thin films as mentioned in this paper, where the authors describe the process of thin film deposition in a vacuum environment and describe the results of their experiments on thin films of different materials.
Abstract: Vacuum deposition of thin films , Vacuum deposition of thin films , مرکز فناوری اطلاعات و اطلاع رسانی کشاورزی

925 citations

Journal ArticleDOI
TL;DR: In this paper, the structural and transport properties of evaporated pentacene organic thin film transistors (TFTs) are reported, and they show the influence of the deposition conditions with different inorganic dielectrics.
Abstract: The structural and transport properties of evaporated pentacene organic thin film transistors (TFTs) are reported, and they show the influence of the deposition conditions with different inorganic dielectrics. Dielectrics compatible with large area fabrication were explored to facilitate low cost electronics on glass or flexible plastic substrates. X-ray diffraction and atomic force microscopy show a clear correlation between the morphology and the structure of the highly polycrystalline films for all dielectrics investigated. The roughness of the dielectric has a distinct influence on the morphology and the structural properties, whereas the films on smooth thermal oxide are in general highly ordered and independent of the deposition conditions. The ordered films exhibit a “thin film” and a bulk phase, and the bulk phase volume fraction increases with the deposition temperature and the film thickness. Careful control of the deposition conditions gives virtually identical films on thermal oxide and silico...

825 citations

Journal ArticleDOI
TL;DR: In this article, the authors demonstrate that laser sintering of inkjet-printed metal nanoparticles enables low-temperature metal deposition as well as high-resolution patterning to overcome the resolution limitation of the current inkjet direct writing processes.
Abstract: All-printed electronics is the key technology to ultra-low-cost, large-area electronics. As a critical step in this direction, we demonstrate that laser sintering of inkjet-printed metal nanoparticles enables low-temperature metal deposition as well as high-resolution patterning to overcome the resolution limitation of the current inkjet direct writing processes. To demonstrate this process combined with the implementation of air-stable carboxylate-functionalized polythiophenes, high-resolution organic transistors were fabricated in ambient pressure and room temperature without utilizing any photolithographic steps or requiring a vacuum deposition process. Local thermal control of the laser sintering process could minimize the heat-affected zone and the thermal damage to the substrate and further enhance the resolution of the process. This local nanoparticle deposition and energy coupling enable an environmentally friendly and cost-effective process as well as a low-temperature manufacturing sequence to realize large-area, flexible electronics on polymer substrates.

724 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
20239
202219
202153
202079
201988
201894