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Vibrating structure gyroscope

About: Vibrating structure gyroscope is a research topic. Over the lifetime, 2099 publications have been published within this topic receiving 18679 citations. The topic is also known as: Coriolis vibratory gyroscope & CVG.


Papers
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Dissertation
01 Jan 1995
TL;DR: In this article, a micromachined gyroscope based on a vibrating ring is described, which measures rotation rate or whole angle inertial rotation by monitoring the position of node lines in a vibration ring.
Abstract: A new micromachined gyroscope based on a vibrating ring is de­ scribed. The device measures rotation rate or whole angle inertial rotation by monitoring the position of node lines in a vibrating ring. To sense rotation, the ring is electrostatically forced into an ellipti­ cally shaped vibration mode and the position of the node lines are capacitively monitored. When the device is subjected to rotation, the node lines, lag behind the rotation due to the Coriolis force. The control and readout circuitry monitors this lag and develops a cor­ rective voltage, that is proportional to the rotation rate, to hold the position of the node lines fixed. The device is fabricated using a low-cost process based on metal electroforming techniques that al­ lows large amounts of circuitry to be included with the sensor. A resolution of approximately 0.5 °/sec in a 10 Hz bandwidth, limited by the on-chip electronics, has been obtained with this new sensor. Further improvements in the on-chip electronics and sensor materi­ als are expected to push the resolution to below 0.5 ° /sec in a 50 Hz bandwidth.

260 citations

Patent
30 May 1997
TL;DR: In this article, a microfabricated gyroscope is used to measure rotation about an axis parallel to the surface of the substrate and cancel any low-frequency forces, and a voltage source is applied to sense fingers to provide bias voltages to nullify quadrature error.
Abstract: A microfabricated gyroscope (20) includes proof mass (22) connected to a frame or substrate (24) to measure rotation about an axis parallel to the surface of the substrate. The micromachined gyroscope includes a suspension system (30), a drive system (32) used to sustain oscillation of the proof mass (22) and a sensing system (34) used to detect deflections of the proof mass (22). The proof mass includes a plurality of electrode fingers (38). Voltage sources (120, 122, 124, 126) apply a voltage to sense fingers (74a-b, 76a-b) of sense electrodes (62a-b) to provide bias voltages to nullify quadrature error, select or adjust the resonant frequency of vibrations of the mass along the sense axis and cancel any centrifugal or other low-frequency forces.

260 citations

Proceedings ArticleDOI
07 Sep 2014
TL;DR: A3 - an accurate and automatic attitude detector for commodity smartphones that primarily leverages the gyroscope, but intelligently incorporates the accelerometer and magnetometer to select the best sensing capabilities and derive the most accurate attitude estimation.
Abstract: The phone attitude is an essential input to many smartphone applications, which has been known very difficult to accurately estimate especially over long time. Based on in-depth understanding of the nature of the MEMS gyroscope and other IMU sensors commonly equipped on smartphones, we propose A3 - an accurate and automatic attitude detector for commodity smartphones. A3 primarily leverages the gyroscope, but intelligently incorporates the accelerometer and magnetometer to select the best sensing capabilities and derive the most accurate attitude estimation. Extensive experimental evaluation on various types of Android smartphones confirms the outstanding performance of A3. Compared with other existing solutions, A3 provides 3x improvement on the accuracy of attitude estimation.

181 citations

Journal ArticleDOI
14 Jan 2014-Sensors
TL;DR: This review surveys micromachined gyroscope structure and circuitry technology and the characteristics of various typical gyroscopes are discussed and investigated in detail.
Abstract: This review surveys micromachined gyroscope structure and circuitry technology The principle of micromachined gyroscopes is first introduced Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes Next, the control electronics of micromachined gyroscopes are analyzed The control circuits are categorized into typical circuitry and special circuitry technologies The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail

178 citations

Proceedings ArticleDOI
05 May 2014
TL;DR: The Disc Resonator Gyroscope (DRG) as discussed by the authors is a compact planar micro-machined design with central support and carries no critical loads, which has been shown to have a stable rate within 0.01° o/h over a week of continual measurement.
Abstract: As microelectromechanical system (MEMS) gyros were being developed for automotive safety and military tactical applications, in 1994 Boeing selected a conventionally-machined hemispherical resonator gyroscope (HRG) for high performance, continuous space pointing applications. In that same year research was begun into high performance MEMS gyros for compact, low-cost space pointing applications. Collaboration with several national MEMS research labs and operational experience with the HRG led to an understanding of the benefits of high Q, symmetrical resonator designs in MEMS. Early post resonator designs led to closed loop, tuned, low-noise electronics design and operation with capacitive sensing but required undesirable 3D assembly of the post onto the micro-machined flexures. High dynamic loading and imprecision of the bonded joints led to gyro bias that was not stable over the long run. This led to the conception of the Disc Resonator Gyroscope (DRG) which yielded a compact planar micro-machined design with central support and carrying no critical loads. Successive optimization of the layout, scale, material selection and fabrication design as well as the operational electronics has led to progressively more stable performance. A recent fixed orientation laboratory run demonstrated a stable rate within 0.01 o /h over a week of continual measurement, believed to be a record for a MEMS gyroscope. This research background behind the DRG and its principle of operation will be presented along with the latest test results which promise high performance, as well as compact, low-cost MEMS gyroscopes for space applications.

172 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202347
202297
202176
202090
2019138
2018157