Topic
von Mises yield criterion
About: von Mises yield criterion is a research topic. Over the lifetime, 4374 publications have been published within this topic receiving 82642 citations. The topic is also known as: Von Mises stress.
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TL;DR: In this paper, a 2D axisymmetric quasic-static model for chemical-mechanical polishing process (CMP) was established based on the principle of minimum total potential energy and axisymmetric elastic stress-strain relations.
Abstract: In this paper, relative velocity at a given point on the wafer was first derived. The revolutions of wafer and pad are assumed the same and the axisymmetric uniformly distributed pressure form is given. Thus, a 2D axisymmetric quasic-static model for chemical-mechanical polishing process (CMP) was established. Based on the principle of minimum total potential energy and axisymmetric elastic stress-strain relations, a 2D axisymmetric quasic-static finite element model for CMP was thus established. In this model, the four-layer structures including wafer carrier, carrier film, wafer and pad are involved. The von Mises stress distributions on the wafer surface were analysed, the effects of axial, hoop, radial and shear stresses to von Mises stress and the effects of axial, hoop, radial and shear strains to deformation of the wafer were investigated. The findings indicate that near the wafer centre, von Mises stress distribution on the wafer surface was almost uniform, then increased gradually with a small amount. However, near the wafer edge, it would decrease in a large range. Finally, it would increase dramatically and peak significantly at the edge. Besides, the axial stress and strain are the dominant factors to the von Mises stress distributions on the wafer surface and the wafer deformation, respectively.
39 citations
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TL;DR: In this article, a constitutive model was implemented in the finite element models combining the Johnson-Cook strain-rate sensitivity model, a nonlinear isotropic-kinematic hardening model, and the Yld2000-2d anisotropic model.
39 citations
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TL;DR: In this paper, the authors examined whether the relationship between the mean and standard deviation of trabecular von Mises stresses can be generalized for any group of cancellous bone.
39 citations
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TL;DR: In this article, a new analytic criterion for porous solids with matrix obeying Tresca yield criterion is derived, which is micromechanically motivated and relies on rigorous upscaling theorems.
39 citations