Microwave photonics (MWP) is an emerging field in which radio frequency (RF) signals are generated, distributed, processed and analyzed using the strength of photonic techniques. It is a technology that enables various functionalities which are not feasible to achieve only in the microwave domain. A particular aspect that recently gains significant interests is the use of photonic integrated circuit (PIC) technology in the MWP field for enhanced functionalities and robustness as well as the reduction of size, weight, cost and power consumption. This article reviews the recent advances in this emerging field which is dubbed as integrated microwave photonics. Key integrated MWP technologies are reviewed and the prospective of the field is discussed.

Integrated microwave photonics

We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.

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Ultra-low-loss high-aspect-ratio Si3N4 waveguides.

The silicon nitride (Si3N4) planar waveguide platform has enabled a broad class of low-loss planar-integrated devices and chip-scale solutions that benefit from transparency over a wide wavelength range (400–2350 nm) and fabrication using wafer-scale processes. As a complimentary platform to silicon-on-insulator (SOI) and III–V photonics, Si3N4 waveguide technology opens up a new generation of system-on-chip applications not achievable with the other platforms alone. The availability of low-loss waveguides (<1 dB/m) that can handle high optical power can be engineered for linear and nonlinear optical functions, and that support a variety of passive and active building blocks opens new avenues for system-on-chip implementations. As signal bandwidth and data rates continue to increase, the optical circuit functions and complexity made possible with Si3N4 has expanded the practical application of optical signal processing functions that can reduce energy consumption, size and cost over today’s digital electronic solutions. Researchers have been able to push the performance photonic-integrated components beyond other integrated platforms, including ultrahigh Q resonators, optical filters, highly coherent lasers, optical signal processing circuits, nonlinear optical devices, frequency comb generators, and biophotonic system-on-chip. This review paper covers the history of low-loss Si3N4 waveguide technology and a survey of worldwide research in a variety of device and applications as well as the status of Si3N4 foundries.

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Silicon Nitride in Silicon Photonics

An overview of the most recent developments and improvements to the low-loss TriPleX Si3N4 waveguide technology is presented in this paper The TriPleX platform provides a suite of waveguide geometries (box, double stripe, symmetric single stripe, and asymmetric double stripe) that can be combined to design complex functional circuits, but more important are manufactured in a single monolithic process flow to create a compact photonic integrated circuit All functionalities of the integrated circuit are constructed using standard basic building blocks, namely straight and bent waveguides, splitters/combiners and couplers, spot size converters, and phase tuning elements The basic functionalities that have been realized are: ring resonators and Mach–Zehnder interferometer filters, tunable delay elements, and waveguide switches Combination of these basic functionalities evolves into more complex functions such as higher order filters, beamforming networks, and fully programmable architectures Introduction of the active InP chip platform in a combination with the TriPleX will introduce light generation, modulation, and detection to the low-loss platform This hybrid integration strategy enables fabrication of tunable lasers, fully integrated filters, and optical beamforming networks

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Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview

We present an overview of several microwave photonic processing functionalities based on combinations of Mach-Zehnder and ring resonator filters using the high index contrast silicon nitride (TriPleXTM) waveguide technology. All functionalities are built using the same basic building blocks, namely straight waveguides, phase tuning elements and directional couplers. We recall previously shown measurements on high spurious free dynamic range microwave photonic (MWP) link, ultra-wideband pulse generation, instantaneous frequency measurements, Hilbert transformers, microwave polarization networks and demonstrate new measurements and functionalities on a 16 channel optical beamforming network and modulation format transformer as well as an outlook on future microwave photonic platform integration, which will lead to a significantly reduced footprint and thereby enables the path to commercially viable MWP systems

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Silicon nitride microwave photonic circuits

A novel class of optical waveguides with a box-shaped cross section consisting of a low-index inner material surrounded by a thin high-index coating layer is presented. This original multilayered structure widens the traditional concept of index contrast for dielectric waveguides toward a more general concept of effective index contrast, which can be artificially tailored over a continuous range by properly choosing the thickness of the outer high-index layers. An electromagnetic analysis is reported, which shows that the transverse electric and transverse magnetic modes are spatially confined in different regions of the cross section and exhibit an almost 90°C rotational symmetry. Such unusual field distribution is demonstrated to open the way to new intriguing properties with respect to conventional waveguides. Design criteria are provided into details, which mainly focus on the polarization dependence of the waveguide on geometrical parameters. The possibility of achieving single-mode waveguides with either zero or high birefringence is discussed, and the bending capabilities are compared to conventional waveguides. The feasibility of the proposed waveguide is demonstrated by the realization of prototypal samples that are fabricated by using the emerging CMOS- compatible Si3N4-SiO2 TriPleX technology. An exhaustive experimental characterization is reported, which shows propagation loss as low as state-of-the-art low-index-contrast waveguides (< 0.1 dB/cm) together with enhanced flexibility in the optimization of polarization sensitivity and confirms the high potentialities of the proposed waveguides for large-scale integrated optics.

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Box-Shaped Dielectric Waveguides: A New Concept in Integrated Optics?

Optical ring resonators (ORRs) are good candidates to provide continuously tunable delay in optical beam forming networks (OBFNs) for phased array antenna systems. Delay and splitting/combining elements can be integrated on a single optical chip to form an OBFN. A state-of-the-art ring resonator-based 1times 8 OBFN chip has been fabricated in complementary metal-oxide-semiconductor-compatible waveguide technology. A binary tree topology is used for the network such that a different number of ORRs is cascaded for delay generation at each output. In this letter, the principle of operation is explained and demonstrated by presenting some measurement results on the 1times 8 OBFN chip.

Single-Chip Ring Resonator-Based 1 $\times$ 8 Optical Beam Forming Network in CMOS-Compatible Waveguide Technology

Optical circuits providing a time delay to signals modulated on optical carriers are considered important for optical communication systems and phased array antennas. A continuously tunable optical delay line is demonstrated in low-cost CMOS compatible LPCVD planar waveguide technology. The device consists of three cascaded ringresonator all-pass filters with fixed circumference of 2 cm (delay of 0.12 ns and FSR of 8.4 GHz). The measured group delay ranges from 0 ns up to 1.2 ns with a bandwidth of 500 MHz and delay ripple smaller than 1 ps, which is in accordance with the calculations.

http://photonics-benelux.org/proc05/s05p079.pdf

Ring resonator-based Tunable Optical Delay Line in LPCVD Waveguide Technology

For enhanced communication on board an aircraft, novel antenna systems with broadband satellite-based capabilities are required. The technology will enhance airline operations by providing in-flight connectivity for flight crew information and will bring live TV and highspeed Internet connectivity to passengers. The installation of such systems on board an aircraft requires for aerodynamic reasons the development a very low-profile aircraft antenna, which can point to satellites anywhere in the upper hemisphere. To this end, phased array antennas which are conformal to the aircraft fuselage are attractive. In this paper, two key aspects of conformal phased array antenna arrays are addressed: the development of a broadband Ku-band antenna and an optical beam forming network for tracking satellites. The antenna elements of the conformal array are stacked patch antennas with dual linear polarization which have sufficient bandwidth. For tracking an optical circuit is proposed that consists of a cascade of optical ring resonators.

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Broadband Conformal Phased Array with Optical Beam Forming for Airborne Satellite Communication

A novel beam steering mechanism for a phased array antenna receiver system is introduced. The core of the system is a ring resonator-based integrated optical beam forming network chip. Its principles are explained and demonstrated by presenting some measurement results. The system architecture around the chip is based on a combination of frequency down conversion, filter-based optical single sideband modulation and balanced coherent detection. It is proven that such an architecture has significant advantages with respect to a straightforward architecture using double sideband modulation and direct detection, namely relaxed bandwidth requirements on the optical modulators and detectors, reduced complexity and optical losses of the beam forming chip, and enhanced dynamic range.

A. Borreman

Papers

Box-Shaped Dielectric Waveguides: A New Concept in Integrated Optics?

Single-Chip Ring Resonator-Based 1 $\times$ 8 Optical Beam Forming Network in CMOS-Compatible Waveguide Technology

Ring resonator-based Tunable Optical Delay Line in LPCVD Waveguide Technology

Broadband Conformal Phased Array with Optical Beam Forming for Airborne Satellite Communication

Phased Array Antenna Steering Using a Ring Resonator-Based Optical Beam Forming Network