Showing papers by "Alain Levasseur published in 2011"

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Journal Article•DOI•

Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance

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Benoit Fleutot¹, Benoit Fleutot², Brigitte Pecquenard¹, Hervé Martinez³, M. Letellier⁴, Alain Levasseur¹ - Show less +2 more•Institutions (4)

University of Bordeaux¹, STMicroelectronics², University of Pau and Pays de l'Adour³, University of Orléans⁴

25 Mar 2011-Solid State Ionics

TL;DR: Amorphous thin solid films of lithium phosphorus oxynitride (LiPON) were prepared by radiofrequency sputtering from a Li 3 PO 4 target by varying nitrogen flow rate as mentioned in this paper.

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136 citations