A circuit and method for electrostatic discharge testing using transmission line pulsing. A plurality of transmission line networks may be connected to a device under test, and each transmission line network may have different connected terminations. Switches may be used to select which transmission line networks are connected to the device under test, and which terminations, if any, are connected to transmission line networks.

Transmission line pulsing

In one embodiment, a radio frequency (RF) impedance matching network includes electronically variable capacitors (EVCs), each EVC including discrete capacitors operably coupled in parallel. The discrete capacitors include fine capacitors each having a capacitance value substantially similar to a fine capacitance value, and coarse capacitors each having a capacitance value substantially similar to a coarse capacitance value. The increase of the variable total capacitance of each EVC is achieved by switching in more of the coarse capacitors or more of the fine capacitors than are already switched in without switching out a coarse capacitor that is already switched in.

System for providing variable capacitance

In one embodiment, a semiconductor processing tool includes a plasma chamber and an impedance matching circuit. The matching circuit includes a first electronically variable capacitor having a first variable capacitance, a second electronically variable capacitor having a second variable capacitance, and a control circuit. The control circuit is configured to determine a variable impedance of the plasma chamber, determine a first capacitance value for the first electronically variable capacitor and a second capacitance value for the second electronically variable capacitor, and generate a control signal to alter at least one of the first variable capacitance and the second variable capacitance to the first capacitance value and the second capacitance value, respectively. An elapsed time between determining the variable impedance of the plasma chamber to when RF power reflected back to the RF source decreases is less than about 150 μsec.

RF impedance matching circuit and systems and methods incorporating same

Полезная модель относится к области радиотехники СВЧ и может быть использована для коммутации СВЧ сигнала одновременно на три выхода с любых трех из n входов, в частности в приемных или передающих трехлучевых антенных решетках. Матричный коммутатор СВЧ включает две диэлектрические пластины и металлическое основание, расположенное между пластинами, в которых выполнены сквозные отверстия. При этом на первой пластине расположены n входных переключателей, имеющих по одному входу и по три выхода, и первый выходной переключатель с одним выходом и n входами, которые через проводники микрополосковой линии соединены с первыми выходами n входных переключателей. На второй пластине симметрично расположены второй и третий выходные переключатели, аналогичные первому, входы которых расположены поочередно по оси симметрии и соединены соответственно со вторыми и третьими выходами входных n переключателей через последовательно соединенные проводники микрополосковой линии и проводники, проходящие через сквозные отверстия пластин. Предлагаемая полезная модель имеет простую конструкцию за счет выполнения СВЧ коммутатора в едином объеме. 1 ил.

Матричный коммутатор свч

A single pole multiple-throw switch for switching an RF signal to one of a plurality of outputs includes coupling the signal to a throw junction, said junction having connected thereto a plurality of switch legs, each leg includes a high voltage shunt diode spaced one quarter-wavelength from the throw junction; each diode mounted at its cathode end to a capacitor and adapted to receive a bias; wherein a controller applies a first DC bias to a selected one of the diodes to cause the selected diode to operate in reverse bias mode, such that the selected diode mounted on the corresponding capacitor provides a low insertion loss to pass the RF signal from the transmission line through the selected leg and to one of the outputs; and applies a second DC bias to the other diodes to cause the other diodes to operate in forward bias mode such that the other diodes mounted onto the corresponding capacitor provides a high insertion loss for blocking the RF signal to the remaining outputs.

Allen R. Wolfe

Papers

High power uhf single-pole multi-throw switch