Showing papers by "Andrew Bleloch published in 2018"
TL;DR: In this article, a 1Å (100 pm) spatial resolution was achieved at primary energies as low as 60 keV in cold field emission (CFEG) STEM and probe currents of ~1 nA in sub-2Å probes at higher keVs.
Abstract: Scanning transmission electron microscopy (STEM) has progressed very significantly in recent years. Improving the spatial resolution by aberration correction has led to 1Å (100 pm) spatial resolution becoming routine at primary energies as low as 60 keV in cold field emission (CFEG) STEM [1-3], and probe currents of ~1 nA have become available in sub-2Å probes at higher keVs. Another important development was the introduction of ultra-high energy resolution monochromators and spectrometers, which have made 5 meV energy resolution electron energy loss spectroscopy (EELS) possible [4].
7 citations