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Andrew Huibers
Researcher at Texas Instruments
Publications - 69
Citations - 3857
Andrew Huibers is an academic researcher from Texas Instruments. The author has contributed to research in topics: Spatial light modulator & Substrate (printing). The author has an hindex of 26, co-authored 69 publications receiving 3855 citations. Previous affiliations of Andrew Huibers include Stanford University.
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Patent
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
TL;DR: In this article, a spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry, where one or more electrostatically deflectable elements are suspended by hinges from the upper substrate.
Patent
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TL;DR: In this article, a method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS devices from contamination, physical contact, or other deleterious external events.
Patent
Reflective spatial light modulator with encapsulated micro-mechanical elements
TL;DR: In this article, a spatial light modulator, comprised of an upper and a lower substrate, is used for spatially modulating light that is incident to, and then reflected back through, the upper substrate.
Patent
Spatial light modulators with light blocking/absorbing areas
Andrew Huibers,Satyadev R. Patel +1 more
TL;DR: In this article, a projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed, where two substrates can be bonded at the wafer level after depositing a getter material and/or liquid lubricant on one or both of the wafers if desired.
Patent
Spatial light modulators with light absorbing areas
TL;DR: In this paper, a projection system, a spatial light modulator, and a method for forming micromirrors are described, where a substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micro-irror elements, and the substrate is fully or selectively covered with a light absorbing material.