A
Annapragada Rao
Researcher at Lam Research
Publications - 1
Citations - 144
Annapragada Rao is an academic researcher from Lam Research. The author has contributed to research in topics: Photoresist & Layer (electronics). The author has an hindex of 1, co-authored 1 publications receiving 144 citations.
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Patent
Method of preventing damage to porous low-k materials during resist stripping
Annapragada Rao,Kenji Takeshita +1 more
TL;DR: In this paper, a patterned photoresist mask is placed over the porous low-K dielectric layer and a feature is etched into the feature after the etching.