The invention relates to an electrically driven hand-held power tool having a drive motor that is configured as a commutator motor comprising a brush for current transfer to the commutator. A removable cover is received in the housing that is the carrier of a spring element, which exerts a spring force in the mounted state on the brush in the direction of the commutator.

Electrically driven hand-held power tool

Described herein is an apparatus and method for delivering fluid components for semiconductor processes such as chemical vapor deposition (CVD) and chemical etch processes. Any prescribed mixture of separate fluid reagents can be delivered with extreme accuracy and precision using the apparatus we describe here. The unique embodiment of a precision fluid pumping system utilizing internal pressure and temperature transducers, capacity volume and restrictive elements that comprise a continuous pulse-free system for use in CVD applications. This system has superior performance characteristics in the areas of: accuracy, precision, repeatability of the fluid mixture delivery and continuous repeatable delivery without intermittent pulsation. We describe a novel fluid pump whose design is integrated using a closed loop feedback system composed of temperature and pressure sensors. This allows the entire system to perform to in either an isobaric-isothermal mode or an isocratic-isothermal mode. The construction of this system is separated into three principle areas (Fluid Pump Hardware), (Fluid phase change hardware) and (Control algorithms), the complete embodiment constitutes a novel invention in the field of chemical delivery as pertaining to the fabrication of semiconductor devices.

Apparatus for fluid delivery in chemical vapor deposition systems

A method of making a field emitter includes anisotropically etching a single crystal silicon substrate to form at least one funnel-shaped protrusion on the substrate, then conformally depositing a refractory metal onto the funnel-shaped protrusion. Alternatively, single crystal silicon may be anisotropically etched to form at least one funnel-shaped recess in the silicon. The etched surface is doped with an impurity to form an etch-stop layer, the remaining undoped silicon is removed, then the etch-stop layer is conformally deposited with a refractory metal. The funnel-shaped recess can then be back-filled with silicon or another suitable material.

Method of making micromachined refractory metal field emitters

An apparatus for a lower pressure chemical vapor deposition capable of achieving various kinds of thin films having a uniform thickness, preventing parts breakage, achieving automation of the system, and combining the use of a low pressure chemical vapor deposition apparatus and a plasma low pressure chemical vapor deposition apparatus, which includes a deposition base (110); a reactor disposed on the deposition base and having a reaction region (R) formed therein; a substrate (141) lifted and lowered in the reactor and on which a wafer is placed; a chemical source gas introducer (131) for introducing a chemical source gas into the reactor; a substrate heating member (150) disposed in the substrate for heating the wafer; and a reactor heating member (160) for heating the reactor.

Apparatus for low pressure chemical vapor deposition

A mass fluid flow controller has a valve which is controlled by a controller rod structure which is substantially pivotally mounted on a metallic diaphragm which stretches and unstretches with the movement of the rod structure. The actuation of the rod structure is by the expansion and contraction of an actuator wire which is heated for the expansion and allowed to cool for the contraction. The primary fluid flow path through the controller is straight. A sensor conduit, provididng a parallel sensor fluid flow path, is connected in position using metallic sealer members which extend in openings to the primary fluid flow path and which are rounded along the direction through such openings. The pressure drop, along the primary fluid flow path, to create flow through the sensor conduit, is provided by a fluid flow restrictor having a core and having lengths of wire along the core which are squeezed between the core and a tapered fluid flow path wall in the vicinity of the sensor conduit input and output connections. A spherical or a conical shape may be used for the form of the core. A valve seat bushing is mounted in pipe structure providing the primary fluid flow path by applying a force against an end surface of the bushing, with movement of the bushing blocked, in order to deform the end surface, push the outer wall of the bushing against the inner wall of the pipe structure, and fix the bushing in the pipe structure. In the relationship between the controller rod structure and a ball which acts as a gate-member for the valve, an elongated stem rod having a sleeve about it may be used in fixing the ball to the controller rod structure. The stem rod may be mounted by fixing it to the elongated sleeve, a distance from the gate-member side of the controller rod structure that is substantially greater than the distance of the position of the ball from the gate-member side of the controller rod structure.

Flow controller, parts of flow controller, and related method

A dual ram fluid cylinder having one ram at each end of the fluid cylinder and wherein the rams substantially simultaneously extend or retract in the same line and in opposite directions in response to selectively directed fluid flow and wherein the extended length is large compared to the retracted length. The fluid cylinder includes an outer housing; an inner housing coaxially located within the outer housing; an outer ram slideably disposed between the outer housing and the inner housing extending exteriorly in a first direction; a fluid transmission tube coaxially located within the inner housing; and an inner ram slideably disposed between the inner housing and the fluid transmission tube extending exteriorly in a second direction.

Dual opposite motion extending and retracting ram fluid cylinders

A hydraulic actuator in which an absorbent material is carried by the actuator housing at the interface between it and the actuator rod to capture fluid leaking from the operating chamber. The fluid captured by the absorbent material is drawn therefrom and is directed to a reservoir in response to the reciprocal movement of the actuator rod relative to the housing.

Hydraulic actuator having a self-aspirating actuator rod seal

A commutator brush holder mounts a pair of tension band springs in quadrature relation. Both springs contact the brush end remote from the commutator and urge the brush into contact with the commutator, with constant force. The quadrature springs promote full and intimate contact between the brush and commutator, thereby minimizing brush bounce and tilt and resultant transient signal generation.

Commutator brush holder quadrature spring

In a clear viewing screen of the kind comprising a fixed screen element; a disk-like screen element supported for rotation at the outside of the window; a motor for driving the rotatable disk-like screen element supported at the inside of the fixed screen element; the motor to coupled the rotatable disk-like screen element, the motor mounted at the periphery of said rotatable disk-like screen element, and a magnetic coupling having first and second coupling halves is provided, one coupling half coupled to the motor, and the other coupling half coupled to the rotatable disk-like screen element, the coupling members disposed opposite each other on opposite sides of the fixed screen element so that coupling can take place without making a hole in the fixed screen element.

Clear view screen

During assembly of a motor, a stator winding is installed in a jig in preparation of cleaning. A brush is moved axially through the central space of the winding. The shaft of the brush is equipped with fluid jets which direct solvent against the winding as it is being brushed. Dislodging of foreign matter from the winding is enhanced by pumping the solvent through the brush shaft in a pulsating manner.

Arnold Schindel

Papers

Dual opposite motion extending and retracting ram fluid cylinders

Hydraulic actuator having a self-aspirating actuator rod seal

Commutator brush holder quadrature spring

Clear view screen

Apparatus for cleaning stator windings