C
Chae Hee Yeop
Researcher at Applied Materials
Publications - 2
Citations - 209
Chae Hee Yeop is an academic researcher from Applied Materials. The author has contributed to research in topics: Etching (microfabrication) & Plasma etching. The author has an hindex of 2, co-authored 2 publications receiving 209 citations.
Papers
More filters
Patent
Selective etching of carbon-doped low-k dielectrics
TL;DR: In this article, a process for selectively etching a low-k dielectric material formed on a substrate using a plasma of a gas mixture in a plasma etch chamber is described.
Patent
Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material
TL;DR: In this article, a process of selectively etching a sacrificial light absorbing material (SLAM) over a dielectric material, such as carbon doped oxide, on a substrate using a plasma of a gas mixture in a plasma etch chamber is described.