C
Charles G. Meador
Researcher at Texas Instruments
Publications - 1
Citations - 14
Charles G. Meador is an academic researcher from Texas Instruments. The author has contributed to research in topics: Photoresist & Silicon oxide. The author has an hindex of 1, co-authored 1 publications receiving 14 citations.
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Patent
Passivation of silicon oxide during photoresist burnoff
TL;DR: In this article, a method of removal of photoresist in a manufacturing process for semiconductor devices utilizes burnoff in an oxidizing atmosphere, in order to reduce contamination of underlying silicon dioxide layers, chlorine in the atmosphere getters Na+ ions, etc.