A substrate processing chamber component is a structure having an integral surface coating comprising an yttrium-aluminum compound. The component may be fabricated by forming a metal alloy comprising yttrium and aluminum into the component shape and anodizing its surface to form an integral anodized surface coating. The chamber component may be also formed by ion implanting material in a preformed metal shape. The component may be one or more of a chamber wall, substrate support, substrate transport, gas supply, gas energizer and gas exhaust.

Process chamber having component with yttrium-aluminum coating

A ceramic thermal barrier coating system for superalloy components subjected to high operating temperatures, such as gas turbine engine airfoils, is disclosed which includes a high purity alumina interfacial layer between the metallic substrate and the ceramic overcoat in order to better resist failure by spalling.

Ceramic thermal barrier coating with alumina interlayer

A thermal barrier protected nickel based or cobalt based superalloy component for use in a gas turbine engine includes a thermal barrier coating system having a multi-layered structure. The first bondcoat layer of the thermal barrier coating system comprises a chemical vapor deposited, platinum modified diffusion aluminide layer on the superalloy component (substrate). The diffusion aluminide layer includes an inner diffusion zone proximate the substrate and an outer layer region comprising a platinum modified (platinum-bearing) intermediate phase of aluminum and at least one of nickel and cobalt depending on the superalloy composition. The intermediate phase is a non-ordered solid solution having a range of compositions and is free of other phase constituents. The intermediate phase has an average aluminum concentration in the range of about 18 to about 26% by weight, an average platinum concentration in the range of about 8 to about 35% by weight, and an average nickel concentration in the range of about 50 to 60% by weight and is non-stoichiometric relative to intermetallic compounds of aluminum and nickel, aluminum and cobalt, and aluminum and platinum. An adherent alpha alumina layer is thermally grown on the diffusion aluminide layer and receives an outer ceramic thermal barrier layer deposited thereon.

Thermal barrier coating system with intermediate phase bondcoat

A process of coating an article includes the steps of (1) forming a layer of a ceramic based compound on an article; (2) providing a solution containing a metal as a particulate having a diameter of about 10 nanometers to about 1000 nanometers and present in an amount of about 25 percent to about 50 percent by volume of the solution; (3) contacting the ceramic based compound layer with the solution; (4) drying the article; and (5) optionally repeating steps (3) and (4).

Thermal barrier coating compositions, processes for applying same and articles coated with same

Adherent, thermal shock-resistant protective coatings for nickel base super alloys are obtained by applying to the base metal a thin bond coat of an alloy of chromium aluminum and yttrium with materials selected from the group consisting of iron, cobalt, nickel and nickel-cobalt and applying thereover a continuously graded mixture of this material with a zirconia-based ceramic, the concentration of zirconia-based ceramic increasing from the bond coat to the outer layer. The zirconia ceramic may be stabilized by the addition thereto of amounts of magnesium oxide or other materials.

Thermal barrier coating for nickel and cobalt base super alloys

A coating alloy for the gas turbine engine super-alloys is described which consists primarily of nickel, aluminum and a reactive metal such as yttrium, particularly at the composition, by weight, 14-30 percent aluminum, 0.01-0.5 percent reactive metal balance nickel. A preferred embodiment also includes 15-45 weight percent chromium.

D Boone

Papers

High temperature oxidation resistant coating alloy