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Daniel L. Laird
Researcher at Motorola
Publications - 1
Citations - 61
Daniel L. Laird is an academic researcher from Motorola. The author has contributed to research in topics: Layer (electronics). The author has an hindex of 1, co-authored 1 publications receiving 61 citations.
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Patent
Pattern writing method during X-ray mask fabrication
TL;DR: A pattern writing method for X-ray mask fabrication is described in this article, where a uniform membrane layer is formed on an Xray absorbing layer and an etch mask is applied on the layer of the absorbing material.