D
Daniel Zucker
Researcher at Sony Broadcast & Professional Research Laboratories
Publications - 1
Citations - 150
Daniel Zucker is an academic researcher from Sony Broadcast & Professional Research Laboratories. The author has contributed to research in topics: Air cooling & Water cooling. The author has an hindex of 1, co-authored 1 publications receiving 150 citations.
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Patent
Heater block cooling system for wafer processing apparatus
TL;DR: In this paper, a cooling system and method for cooling a heater block located in a cylindrical processing chamber of a wafer processing apparatus is described, and the cooling system includes first and second frame assemblies having respective ends adapted to rest on an upper peripheral surface of the processing chamber, and fan assemblies mounted to the frame assemblies at spaced locations there along.