D
Dave W. Jentz
Publications - 1
Citations - 99
Dave W. Jentz is an academic researcher. The author has contributed to research in topics: Copper interconnect & Plating. The author has an hindex of 1, co-authored 1 publications receiving 99 citations.
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Method of copper electroplating
TL;DR: An electroplating process for filling damascene structures on substrates, such as wafers having partially fabricated integrated circuits thereon, includes immersing a substrate, under bias, into a copper plating solution to eliminate thin seed layer dissolution and reduce copper oxide as discussed by the authors.