An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.

Spatial light modulator and method

A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

An image simulation system 20 for testing sensor systems 26 and for training image sensor personnel wherein synthetic image data is generated by a scene generator 21 and projected by an image projector 23. The image projector 23 uses a digital micromirror device array 27 to modulate the incident energy and create an image. Four modulation schemes are discussed including digital pulse-width modulation, phase contrast modulation, full complex modulation, and analog modulation. The digital pulse width modulation technique will typically require synchronizing the image sensor and the image projector. Phase contrast modulation, full complex modulation, and analog modulation do not require synchronizing the image projector 23 and the sensor system 26. Phase contrast modulation and full complex modulation have the capability to produce phase information within the image. The image simulation system 20 can produce high contrast images and is more flexible than prior art system.

Digital micro-mirror based image simulation system

A crossbar switch (200) with bifurcated optical fibers (271, . . . , 286) having equivalent ends connected to transmitters (251, . . . , 254) and receivers (261, . . . , 264) and single ends in a linear array (245) that is adjacent to a linear micro lens array (240) and a linear spatial light modulator (230) with light emitted from a single end reflected back into the single end for undeflected pixels in the spatial light modulator (230) and lost for deflected pixels.

Optical fiber interconnection network including spatial light modulator

A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.

Spatial light modulators with light blocking/absorbing areas

A micromirror spatial light modulator having an associated silicon photodiode for photoaddressing a micromirror array, and a readout system for providing intensity-to-position encoding and for providing a color image from coded monochromatic input light.

David Armitage

Papers

Micromirror spatial light modulator