Showing papers by "David C. Miller published in 2003"

Systems and methods for overcoming stiction

Abstract: A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

Floating entrance guard for preventing electrical short circuits

Abstract: Method and apparatuses are provided for protecting an interconnect line (216) in a microelectromechanical system. The interconnect line (216) is disposed over a substrate for conducting electrical signals, such as from a bonding pad (204) to a mechanical component to effect movement as desired of the mechanical component. A first protective covering (208) is disposed over a first portion of the interconnect line and a second protective covering (212) is disposed over a second portion of the interconnect line. The first protective covering (208) is provided in electrical communication with the substrate and the second protective covering is electrically isolated from the substrate.

Method for reducing leaching in metal-coated mems

Abstract: A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems

Abstract: We introduce the Network Photonics' Crosswave as the first commercially-available, MEMS-based wavelength selective switch. The CrossWave combines the functionality of signal demultiplexing, switching and re-multiplexing in a single all-optical operation using a dispersive element and 1-D MEMS. 1-D MEMS, where micronurrors are configured in a single array with a single mirror per wavelength, are fabricated in a standard surface micromachining process. In this paper we present three generations of micromirror designs. With proper design optimization and process improvements we have demonstrated exceptional mirror flatness (<16.2m -1 curvature), surface error (<λ/200), and surface roughness (<7A RMS and <4nm peak-to-valley). These values were shown to be comparable to those obtained from bulk micromachining. This excellent optical performance in combination with a CMOS-like approach of the SUMMiT IV process (currently available at a commercial foundry) have demonstrated the emerging leadership of surface micromachining for upcoming optical telecom-munication applications.