Provided are encased parallel channel adsorbent contactor apparatus and systems and swing adsorption processes related thereto. Encased parallel channel adsorbent contactors are useful in swing adsorption processes. A plurality of the encased adsorbent contactors are loaded and sealed together in a swing adsorption vessel such that substantially an entire feed stream must pass through the channels of the contactors and not through stray gaseous stream paths between contactors.

Apparatus and systems having an encased adsorbent contactor and swing adsorption processes related thereto

Methods of designing zeolite materials for adsorption of CO2 Zeolite materials and processes for CO2 adsorption using zeolite materials

Adsorbent Materials And Methods of Adsorbing Carbon Dioxide

Provided are apparatus and systems having a rotary valve assembly integrated with a reciprocating valve assembly to perform swing adsorption processes. The rotary valve assembly is utilized with the reciprocating valve assembly to manage the flow of streams through the system in an enhanced manner.

Apparatus and systems having a rotary valve assembly and swing adsorption processes related thereto

Provided are apparatus and systems for performing a swing adsorption process. This swing adsorption process may involve passing fluids through an adsorbent bed unit having a contactor disposed within to separate contaminates from other target components. The process includes a purge stream that introduced into the contactor at a location between a first portion and a second portion of the contactor.

Apparatus and system for swing adsorption processes related thereto

An apparatus and process for recovering a desired gas such as xenon difluoride, xenon, argon, helium or neon, from the effluent of a chemical process reactor that utilizes such gases alone or in a gas mixture or in a molecule that becomes decomposed wherein the chemical process reactor uses a sequence of different gas composition not all of which contain the desired gas and the desired gas is captured and recovered substantially only during the time the desired gas is in the effluent.

Method and equipment for selectively collecting process effluent

Condensable materials, such as but not limited to tungsten fluoride (WF 6 ), can be used deposit films in a chemical vapor deposition (CVD) process. Described herein are methods to collect and reuse the condensable materials that are unreacted in the production process rather than treat these materials as waste. In one embodiment, when a condensable material, such as gaseous WF 6 , is not supplied to the CVD reactor, it is redirected to a recovery cabinet for capture.

System and method for tungsten hexafluoride recovery and reuse

The invention discloses an apparatus and a method for recovering a desired gas such as xenon difluoride, xenon, argon, helium or neon from an effluent of a chemical process reactor. The chemical process reactor utilizes such gases alone or in a gas mixture manner or in a decomposed molecule manner, wherein the chemical process reactor uses a sequence composed of different gases not all of which contain the desired gas and the desired gas is captured and recovered substantially only during the time the desired gas is in the effluent.

Method and apparatus for selectively collecting process effluent

PROBLEM TO BE SOLVED: To provide a method and an apparatus for recovering desired gases such as xenon difluoride, xenon, argon, helium or neon from exhausts of a chemical processing reactor.SOLUTION: This apparatus comprises a chemical processing reactor 10 with one or more lines for introducing two or more kinds of separate gas compositions; at least one inflow entrance 11 for introducing the separate gas compositions; an exhaust line 18 from the chemical processing reactor; a check valve 20 in the exhaust line; a recovery line 24, in which the desired gases can be picked up from the exhaust line; an automatic valve 26 in the recovery line; a processing controller 104; and a compressor 28 in the recovery line. The processing controller introduces the gas compositions, operates the automatic valve in the recovery line, and thereby controls the automatic valve to be opened at least partially while the desired gases exist in the exhaust line.

David Charles Winchester

Papers

Method and equipment for selectively collecting process effluent

System and method for tungsten hexafluoride recovery and reuse

Method and apparatus for selectively collecting process effluent

Method and apparatus for selectively collecting processing exhaust

Method and equipment for selectively collecting process effluent gases