An air flow rate sensor and throttle valve which controls the opening of a duct in accordance with the detection signals from the air flow rate sensor are provided in a control duct between a supply chamber utilizing double ceilings and the air diffusers in the supply chamber. The quantities of air fed from the respective air diffusers can be equalized or can be set to the desired values. In this case, since the air blowing can be automatically controlled for each diffuser, it is not necessary to individually adjust the quantities of air for the respective air diffusers after the installation of the air conditioner, thereby eliminating the adjusting works of the air diffusers.

Air conditioning apparatus

An apparatus and method for neutralizing static electric charges are disclosed, which include a cooperating pair of laterally spaced apart electrodes disposed so as to be in a flow path of a moving airstream. A relatively high positive DC voltage is applied to one electrode, and a relatively high negative DC voltage is applied to the other electrode. As a result, the electrodes generates free positive and negative ions, which are carried away by the airstream and delivered directly to the manufacturing area, where they are attracted to opposite static charges. Thus the ions act to neutralize static charges of either polarity, and the excess ions will eventually be attracted to each other or to ground, leaving no static in the area. In a preferred embodiment, the electrodes are mounted immediately downstream of a HEPA filter bank which removes essentially all particulate matter and dust before the ions are generated in the airstream.

Apparatus and method for neutralizing static electric charges in sensitive manufacturing areas

The present invention relates to an air-conditioning and an environmental control device for manufacturing plants of integrated circuits, chemicals and foods, hospitals, etc. where clean air is required. In this environmental control device, controlled air blows out from one side and is absorbed into the other side of the room. The blowing surface and the absorbing surface are divided on the basis of the predetermined module. Ventilating units are formed in a suitable size to conform to the module. Because of the construction, the controlling system of temperature or cleanliness of the air in the environmental control room can be rearranged to an optional one by replacing or changing positions of the ventilating units. Even if a controlling system is rearranged to an optional one, the room should be divided into a supply chamber, a mixing chamber, an environmental control chamber and a return chamber from one side to the opposite side of the room, so that air conditioned can flow as required. Conditioned air enters the supply chamber, and air from the supply chamber and air from the return chamber are mixed in the mixing chamber. The mixed air passes through the ventilating units contained in the mixing chamber to be supplied into the environmental control chamber. The ventilating units have a fan and a high efficiency particulate air (HEPA) filter.

Rearrangeable partial environmental control device

The invention provides a system and method comprising an apparatus for removing contaminants from a gas in a semiconductor processing device, which can include a filter unit having at least two parallel filter stages located therein. The filter stages are designed to remove a least a portion of the contaminants present in the gas flowing through them. The apparatus can also include a flow controller for distributing the gas flow among the filter stages. In one embodiment, the controller may consist of a diffuser plate. The invention also provides a sampling tube orifice for gas flow control in a system or method of the invention. In another embodiment, an apparatus for removing contaminants from a gas in a clean room comprises a filter unit having at least two parallel filter stages, which are used to remove a portion of the contaminants in the gas as it passes through the apparatus.

System and method for removing contaminants

A method implemented in a computer infrastructure having computer executable code tangibly embodied on a computer readable medium being operable to determine at least one data center condition and determine or estimate a current energy cost. Additionally, the method includes dynamically control a heating, ventilation and air conditioning (HVAC) system of the data center based on the determined at least one data center condition and the determined or estimated current energy cost.

System and method to control data center air handling systems

A high efficiency air filter system of the type used in clean rooms and the like, and having a sliding plate valve associated with each filter. The sliding plate valve is positioned on the downstream side of each filter, and includes a highly viscous, non-evaporating fluid positioned between the plates to thereby prevent the air from flowing laterally between the plates, whereby the volume of air flow may be accurately controlled over the full area of the clean room as well as the full area of each filter.

David E. Wilcox

Papers

Flow control apparatus and air filters

Steuereinrichtung fuer die luftstroemung eines raumes, insbesondere eines sauberraumes