D
David R. Wanlass
Researcher at Intel
Publications - 1
Citations - 69
David R. Wanlass is an academic researcher from Intel. The author has contributed to research in topics: Etching (microfabrication) & Oxide thin-film transistor. The author has an hindex of 1, co-authored 1 publications receiving 69 citations.
Papers
More filters
Patent
Method of manufacture of an epitaxial semiconductor layer on an insulating substrate
TL;DR: In this article, a thin epitaxial layer of silicon is disposed on a supporting silicon substrate and a silicon oxide layer or other suitable layer is formed on the epitaxially layer.