A plasma processing apparatus wherein a layer structure consisting of plural layers formed in stack one upon another on a semiconductor wafer placed on the sample holder located in the process chamber, is etched with plasma generated in the process chamber by supplying high frequency power to the electrode disposed in the sample holder, the apparatus comprising a ring-shaped electrode disposed above the electrode and around the periphery of the top portion of the sample holder, an outer circumferential ring of dielectric material disposed above the ring-shaped electrode and opposite to the plasma, and a power source for supplying power at different values to the ring-shaped electrode depending on the sorts of layers of the layer structure.

Plasma Processing Apparatus

Modeling and computer-aided design (CAD) techniques are essential for microwave design, especially with the drive towards first-pass design success. We have described neural networks for microwave modeling and design. Neural networks are suitable when modeling a required relationship for which analytical formulas are hard to derive, or for which the computational effort is too high. This relationship can be either of the IO relationship of the overall model (straight neural network model), the output-input relationship (inverse model), a relationship between existing model and desired data (neuro-SM), or relationship of a subpart of the overall model (knowledge based neural network). Neural networks are fast to evaluate, and the neural network formulas are easy to implement into microwave CAD. The simplicity of adding input neurons or hidden neurons makes neural network flexible in handling functions of different dimensions and of different degree of nonlinearity. We have also demonstrated that neural networks are helpful in developing parametric or scalable models for passive and active microwave devices.

Smart Modeling of Microwave Devices

A method of monitoring an element in wireless communication system is provided. An operational noise measurement is obtained by measuring a noise value outside of a bandwidth of a first device, but within a bandwidth of a second, subsequent device. The operational noise measurement is alternatively obtained by tuning an input band of the element to shift the input band partially or completely outside of a bandwidth of a first device to create an open band or by suppressing an input of the antenna and measuring noise within the open bandwidth of the element of the wireless communication network. A stored parameter is retrieved and compared to the measured operational noise. Alternatively, a leakage signal of the element may be received at a signal receiver and compared to a reference. The reference is a function of components of the wireless communication system in a leakage path of the leakage signal.

Gain measurement and monitoring for wireless communication systems

Method for monitoring borders or peripheries of installations includes arranging sensors periodically along the border at least partially in the ground, the sensors being sensitive to vibrations, infrared radiation, sound or other disturbances, programming the sensors to wake-up upon detection of a predetermined condition and receive a signal, analyzing the signal and transmitting a signal indicative of the analysis with an identification or location of the sensors. The sensors may include a processor embodying a pattern recognition system trained to recognize characteristic signals indicating the passing of a person or vehicle.

Perimeter Monitoring Techniques

A radio frequency identifier (RFID) tag can comprise an RFID chip, an antenna, and a feed line electrically coupling the RFID chip to the antenna. An encoded information reading (EIR) terminal can comprise a microprocessor, a memory communicatively coupled to the microprocessor, a communication interface, and an EIR device provided by a bar code reading device, an RFID reading device, or a card reading device. The RFID reading device can further comprise an antenna and a feed line. The antenna for the RFID tag or for the RFID reading device can be provided by a patch cell, a patch cell array comprising two or more patch cells, or by a patch cell stack comprising two or more patch cells. An equivalent circuit for the patch can comprise at least two inductances and a shunt capacitance. An equivalent circuit for the patch cell array can comprise two or more inductance groups connected via a series capacitance and two or more shunt capacitances. An equivalent circuit for the patch cell stack can comprises two or more capacitances connected via a series inductance and two or more shunt inductances. The antenna can have a composite right- and left-handed (CRLH) structure.

RFID devices using metamaterial antennas

The invention provides a filter network comprising a plurality of circuit branches, each circuit branch comprising one or more filter elements. At least one of the circuit branches comprises a resonant circuit and is preferably arranged between the circuit path and ground. The filter network further comprises a switch device associated with the resonant circuit, the switch device being operable between an on state, in which the resonant circuit is connected to said circuit path, and an off state in which the resonant circuit is substantially isolated from said circuit path. The filter network also includes a switch control input for receiving a signal for operating the switch device between the on and off states. Switching in and out the resonant circuit changes the operational characteristics of the filter.

Multi-Mode Filter

This paper presents details and results of the development of a low-cost, narrow-band, long range radar (LRR) front end system at 24 GHz, intended for autonomous cruise control (ACC) and other medium and long-range automotive applications The system uses a high directivity patch array Tx/Rx antenna and a low-cost, high sensitivity RF front end The narrow band, pulse radar concept is well suited for the applications envisaged, avoiding at the same time some well known regulatory issues related with existing UWB short range systems The accurate azimuth detection functionality has been implemented by employing a phase/amplitude comparison monopulse solution using a dual receive patch-array antenna Key performances currently achieved with the new system include: range detection of up to 120 meters for regular car size targets, azimuth detection range of plusmn 8deg, with azimuth accuracy better than 03deg The successful realization of such low-cost, long range radar system at 24 GHz could potentially lead to two important developments in the near future: the implementation of the new radar technologies into the lower class, high volume car market and challenging the dominance of the much more expensive ACC systems currently developed at 77 GHz

A 24GHz Low-Cost, Long-Range, Narrow-Band, Monopulse Radar Front End System for Automotive ACC Applications

An boundary monitoring apparatus comprising an object detection device arranged to transmit a signal into a detection region and to detect an object in said detection region upon receipt of a reflected signal from said object; means for defining a boundary in said detection region; means for determining a path of said object in the detection region; means for performing an evaluation of the determined path of the object with respect to the boundary; and means for causing an alarm event depending on the evaluation.

Boundary crossing object detection system

PROBLEM TO BE SOLVED: To provide a filter circuit network which is selectively operable in two or more frequency bands. SOLUTION: A filter circuit network 130 comprises a plurality of circuit branches, each circuit branch comprising one or more filter elements. At least one of the circuit branches comprises resonant circuits 39, 43 and is connected between the circuit path and ground. The filter circuit network 130 further comprises switch devices 42, 46 associated with the resonant circuits 39, 43, the switch device being operable between an on state, in which the resonant circuits 39, 43 are connected to the circuit path, and an off state in which the resonant circuits 39, 43 are substantially isolated from the circuit path. The filter circuit network 130 also includes a bias input terminal 47 for receiving a signal for operating the switch devices 42, 46 between the on and off states. Switching in and out the resonant circuits changes operational characteristics of the filter circuit network 130. COPYRIGHT: (C)2005,JPO&NCIPI

Filter circuit network, its design method and multi-band transmitter

A wideband chip antenna which is capable of receiving and transmitting signals from an ultra wideband system, where the ultra wideband system comprising a plurality of band groups, and where the response of the antenna can be tuned at the design stage so that a zero in the response of the antenna falls so that its peak is at a particular given frequency, and so that the zero occurs inside an unwanted band group of the ultra wideband system.

Denver Humphrey

Papers

Multi-Mode Filter

A 24GHz Low-Cost, Long-Range, Narrow-Band, Monopulse Radar Front End System for Automotive ACC Applications

Boundary crossing object detection system

Filter circuit network, its design method and multi-band transmitter

Feed-point tuned wide band antenna