E
Eguchi Youichi
Publications - 1
Citations - 28
Eguchi Youichi is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Schottky diode. The author has an hindex of 1, co-authored 1 publications receiving 28 citations.
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Manufacture of semiconductor device
TL;DR: In this article, the authors proposed a method to enable arbitrary selection of the forward voltage of a Schottky barrier diode within a certain range by a method wherein a metal silicide film formed on an Si substrate is etched into a required film thickness by sputter etching.