A plasma treatment apparatus for thin-film deposition includes a reactor chamber; a pair of parallel-plate electrodes disposed inside the chamber; and a radio-frequency power supply system used for transmitting radio-frequency power to one of the parallel-plate electrodes via multiple supply points provided on the one of the parallel-electrodes The radio-frequency power supply system includes a radio-frequency transmission unit which includes an inlet transmission path and multiple branches branched off from the inlet transmission path multiple times Each branch is connected to the supply point and has a substantially equal characteristic impedance value

Plasma treatment apparatus

Methods and apparatuses for portable mass spectrometry are disclosed. The apparatuses comprise at least one source of ionized analyte, at least one frequency scanning subsystem, at least one detector, and optionally at least one vacuum pump, and are portable. In some embodiments, the apparatuses comprise multiple sources of ionized analyte and/or are configured to obtain mass spectra of a large analyte, such as analyte with an m/z ratio of at least 10 5 , or analyte with a molecular weight of at least 10 5 Da, as well as mass spectra of small molecule analyte. In some embodiments, the methods comprise obtaining mass spectra with a portable apparatus described above.

Apparatuses and methods for portable mass spectrometry

A novel system and method for charge-monitoring mass spectrometry is provided. The mass spectrometer can be used to measure the mass of one or more analytes having masses in the range of about a few Daltons to more than about 1015 Daltons. The invention can be used for rapid mass distribution measurements. For example, the system and method can be used to distinguish cancer cells from normal cells when their mass distributions are different.

System and method for performing charge-monitoring mass spectrometry

Methods and systems for ultrasound ionization mass spectrometry are provided. Analytes in a sample are ionized by subjecting them to ultrasound, facilitating their analysis by mass spectrometry. With these methods and systems, soft ionization of large analytes, including biological macromolecules and nanoparticles, can be achieved. Ionization efficiency can be improved by addition of chemicals such as, for example, organic solvents or acids to the sample.

Ultrasound ionization mass spectrometer

The resonance frequency of the resonant circuit, which is used to apply the RF high voltage to an electrode of the ion trap device, is deliberately shifted from the frequency of the RF driver (driving frequency). This reduces the influence of the deviation in the resonance frequency caused by the change in the RF high voltage on the shift in the phase difference between the output of the RF driver and the RF high voltage. This minimizes the degradation of various performances of the ion trap device relating to the phase difference, such as the shift in the peaks of the mass spectrum, and enhances the precision and sensitivity of the mass analysis of the mass spectrometers using the ion trap device.

Ion trap device and its tuning method

A resonator circuit capable of resonating at a predetermined frequency is provided. The resonator circuit comprises a fixed position coil inductor ( 62 ) having a longitudinal axis ( 92 ) and a capacitor ( 88, 82 ) electrically connected in parallel with each other to form a resonator ( 60 ), so that respective first and second ends of the inductor and the capacitor are electrically coupled together at a high-voltage end ( 64 ) and a low-voltage end ( 66 ) of the resonator ( 60 ). A radio frequency (RF) input coupling ( 70 ) is coupled directly to the inductor ( 62 ) at the low-voltage end ( 66 ) of the resonator. A high-voltage electrode ( 72 ) is coupled to the high-voltage end ( 64 ) of the resonator. A first resonator tuning mechanism is provided for varying the inductance of the inductor, comprising a plunger ( 90 ) movable within the coil of the inductor ( 62 ) along the longitudinal axis ( 92 ). A second resonator tuning mechanism is provided for varying the capacitance of the capacitor ( 88, 82 ). The first tuning mechanism provides fine tuning of the resonator by means of varying the inductance of the inductor ( 62 ), and the second tuning mechanism provides coarse or initial tuning of the resonator by means of varying the capacitance of the capacitor ( 88, 82 ).

Tunable and matchable resonator coil assembly for ion implanter linear accelerator

PROBLEM TO BE SOLVED: To provide a resonance circuit, equipped with a tuning and matching mechanism and a coil assembly used for an ion implantation apparatus. SOLUTION: In the resonant circuit, a resonator 60 is composed of capacitors 88 and 82, and a fixed inductor 62 that are connected together in parallel. The first and second ends of the inductor and capacitors are each connected to a high-voltage terminal 64 and a low-voltage terminal 66, and an RF input coupling is linked to the inductor with a low-voltage terminal, and a high- voltage electrode is connected to a high-voltage terminal. A first resonator tuning mechanism (ring clamp 88), equipped with a plunger 90 movable in the coil of the inductor, is provided to change the inductor in inductance, a second resonator tuning mechanism (plunger 90) is provided so as to vary the capacitance for a capacitor. The first resonator tuning mechanism changes the inductor in inductance so as to finely adjust a resonance circuit, and the second resonator tuning mechanism changes the capacitor in capacitance that a resonance circuit is adjusted coarsely.

Ernest Frederick Sheller

Papers

Tunable and matchable resonator coil assembly for ion implanter linear accelerator

Resonant circuit for ion implantation accelerator