F
Fan-Tien Cheng
Researcher at National Cheng Kung University
Publications - 236
Citations - 4080
Fan-Tien Cheng is an academic researcher from National Cheng Kung University. The author has contributed to research in topics: Virtual metrology & Metrology. The author has an hindex of 35, co-authored 226 publications receiving 3801 citations. Previous affiliations of Fan-Tien Cheng include National Chiao Tung University & TSMC.
Papers
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Journal ArticleDOI
Efficient algorithm for optimal force distribution-the compact-dual LP method
Fan-Tien Cheng,David E. Orin +1 more
TL;DR: An efficient algorithm, the compact-dual linear programming (LP) method, is presented to solve the force distribution problem and is applicable to a wide range of systems, constraints, and objective functions and yet is computationally efficient.
Journal ArticleDOI
Resolving manipulator redundancy under inequality constraints
TL;DR: In this paper, physical constraints are considered in the general formulation of the redundant inverse kinematic problem and the computationally efficient compact quadratic programming (QP) method is formed to resolve the constrained kinematics redundancy problem.
Journal ArticleDOI
A Novel Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing
TL;DR: In this article, a virtual metrology scheme (VMS) is proposed to predict the quality of each production wafer using parameters data from production equipment, so that equipment-performance drift can be detected promptly.
Efficient algorithms for optimal force distribution in multiple-chain robotic systems
David E. Orin,Fan-Tien Cheng +1 more
TL;DR: In this article, a two-level hierarchical control scheme is proposed to solve the large-scale control problem for multiple-chain robotic systems forming simple closed-kinematic loops, where the upper-level coordinator collects all the necessary information and solves the inter-chain coordination problem which is, in fact, the force distribution problem.
Patent
Quality prognostics system and method for manufacturing processes
TL;DR: In this paper, a quality prognostics system and a quality prediction method for predicting the product quality during manufacturing processes are disclosed, which utilizes current production tool parameters sensed during the manufacturing process and several previous quality data collected from the measurement tool to predict the future product quality.