F
Fujiyama Yuichiro
Publications - 1
Citations - 63
Fujiyama Yuichiro is an academic researcher. The author has contributed to research in topics: Electrode & Silicon nitride. The author has an hindex of 1, co-authored 1 publications receiving 63 citations.
Papers
More filters
Patent
Semiconductor device and manufacturing method thereof
Fujiyama Yuichiro,Itou Fumitaka +1 more
TL;DR: In this article, a silicon nitride film (a first insulating film) is formed so as to cover a plurality of gate electrodes 3b, and then an ozone tetraethylorthosilicate (TEOS) film and a plasma TEOS film are laminated in order.