This document discusses, among other things, an apparatus including a silicon die including a vibratory diaphragm, the die having a silicon die top opposite a silicon die bottom, with a top silicon die port extending from the silicon die top through the silicon die to a top of the vibratory diaphragm, and with a bottom silicon die port extending from the silicon die bottom to a bottom of the vibratory diaphragm, wherein the bottom silicon die port has a cross sectional area that is larger than a cross-sectional area of the top silicon die port, a capacitor electrode disposed along a bottom of the silicon die, across the bottom silicon die port, the capacitor electrode including a first signal generation portion that is coextensive with the top silicon die port, and a second signal generation portion surrounding the first portion.

Microelectromechanical pressure sensor including reference capacitor

One example includes an integrated circuit including at least one electrical interconnects disposed on an elongate are extending away from a main portion of the integrated circuit and a microelectromechanical layer including an oscillating portion, the microelectromechanical layer coupled to the main portion of the integrated circuit, wherein the microelectromechanical layer includes a cap comprising a membrane that extends to the integrated circuit.

Sealed packaging for microelectromechanical systems

This document discusses, among other things, a cap wafer and a via wafer configured to encapsulate a single proof-mass 3-axis gyroscope formed in an x-y plane of a device layer. The single proof-mass 3-axis gyroscope can include a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor, a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency.

Micromachined monolithic 3-axis gyroscope with single drive

A detection device includes a driving circuit which drives a vibrator, and a detection circuit which detects a desired signal The driving circuit includes a current-voltage conversion circuit which receives a feedback signal, and performs a current-voltage conversion, a drive signal output circuit which amplifies an input voltage signal after being subjected to the current-voltage conversion, and outputs a drive signal of a sine wave, and a gain control circuit which controls a gain of amplification of the drive signal in the drive signal output circuit When a resistance for a current-voltage conversion is set to RI, the gain of the amplification of the drive signal in the drive signal output circuit is set to K, and an equivalent series resistance in a fundamental wave mode of the vibrator is set to R, the gain control circuit performs a gain control such that K×RI=R is satisfied

Detection device, sensor, electronic apparatus, and moving object

The device layer of a 6-degrees-of-freedom (6-DOF) inertial measurement system can include a single proof-mass 6-axis inertial sensor formed in an x-y plane, the inertial sensor including a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards the edge of the inertial sensor, a central suspension system configured to suspend the 6-axis inertial sensor from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 6-axis inertial sensor about a z-axis normal to the x-y plane.

Micromachined monolithic 6-axis inertial sensor

A physical quantity sensor system (11) drives a physical quantity sensor (10), and detects a physical quantity signal (Dphy) from a sensor signal (Ssnc). Analog/digital conversion circuits (102m, 102s) convert a monitor signal (Smnt) and the sensor signal (Ssnc) respectively to a digital monitor signal (Dmnt) and a digital sensor signal (Dsnc). A drive control circuit (103) controls a drive signal (Sdrv) according to the digital monitor signal (Dmnt). A phase adjustment circuit (104) adjusts the phase difference between the digital monitor signal (Dmnt) and the digital sensor signal (Dsnc). A detector circuit (105) carries out multiplication of the digital sensor signal and the digital monitor signal, the phase difference between the signals being adjusted by the phase adjustment circuit (104), thereby detecting the physical quantity signal (Dphy).

Physical quantity sensor system and physical quantity sensor device

A delta-sigma modulation circuit with a gain control function includes a variable gain amplifier, a control unit that controls the gain of the variable gain amplifier, a delta-sigma modulator that inputs an output from the variable gain amplifier, and a filter circuit that inputs an output from the delta-sigma modulator The control unit that controls the gain of the variable gain amplifier gain controls the delta-sigma modulator By this, the optimum dynamic range is obtained according to the setting level of the variable gain amplifier without causing the dynamic range to vary depending on the setting level of the variable gain amplifier

Delta-sigma modulation circuit with gain control function

A first second- or higher-order delta sigma modulator and a second second- or higher-order delta sigma modulator having a notch characteristic are cascaded together, and a delayed signal of the output of the first delta sigma modulator and a differential signal of the output of the second delta sigma modulator are added together. The amount of feedback from the output portion to the input portion of the first delta sigma modulator and the amount of feedback from the output portion to the input portion of the second delta sigma modulator are made the same.

Delta sigma modulating apparatus

A delta-sigma modulation quantization loop, comprising an integration circuit for integrating the difference between an analog input signal and a feedback reference voltage, a local quantizer for quantizing the output of the integration circuit into a digital signal, and a DA converter for generating the feedback reference voltage from the digital output of the local quantizer, is used as a single stage, and a plurality of the stages are cascade-connected. In the second-stage and subsequent modulation quantization loops, the difference signal between the input of the local quantizer of the previous stage and the output of the DA converter of the previous stage is used as an analog input signal. The feedback reference voltages of the respective delta-sigma modulation quantization loops are set individually so as to be higher than the specified maximum voltage of the analog input signal to limit the gains of the respective delta-sigma modulation quantization loops. Gain setting devices are provided in a noise reduction circuit to roughly compensate the gains limited in the respective delta-sigma modulation quantization loops.

Cascade delta-sigma modulator

A physical quantity detection circuit ( 12 ) is used for a physical quantity sensor ( 10 ) that outputs a sensor signal according to a physical quantity given externally. In the physical quantity detection circuit ( 12 ), an analog-to-digital converter ( 104 ) converts an analog sensor signal (Ssnc) to a digital sensor signal (Dsnc). A digital filter ( 100 ) attenuates a frequency component of the digital sensor signal (Dsnc) that is higher than a predetermined cutoff frequency. A multiplier ( 106 ) multiplies a digital sensor signal (Dps) having passed the digital filter ( 100 ) by a digital detection signal (Ddet) to detect a digital physical quantity signal (Dphy).

Fumihito Inukai

Papers

Physical quantity sensor system and physical quantity sensor device

Delta-sigma modulation circuit with gain control function

Delta sigma modulating apparatus

Cascade delta-sigma modulator

Physical quantity detection circuit and physical quantity sensor device