PURPOSE:To perform correctly the guide of a table by providing a table on a base stand via air bearings utilizing a guide member. CONSTITUTION:Between a base stand 10 and a table 50, a driving mechanism 60 to drive the table 50 in a Y axis direction is provided. This table 50 is regulated and guided by position regulating means of X and Z axes directions consisting of guide members 11, 12 and air bearings 51, 53, 54. And the guide member 11 is fitted to the base stand 10 with its straightness corrected by a bend correcting member 40 arranged at least >= three sets in a Y axis direction, and also the guide members 11, 12 are made up with a stone like member and the secular change is prevented.

Three dimensional automatic measuring machine

PURPOSE:To accurately move both support in parallel, by providing a tension member to both supports under tension through a tension adjusting jig and a guide so that the tension directions thereof are become opposite to each other. CONSTITUTION:If a slide base 4 is pulled to a forward side by a tension member 16 under the actions of a drive device 20 and a guide 10 in order to move a moving body 2 to the forward side, the same tension is also simultaneously transmitted to the front surface side part Yc of the other slide base 5 by the tension member 17 provided to the rear surface side part Yb of the slide base 4 under tension and by guides 13-15. Therefore, only by the action to one side, the other side receives action simultaneously, in other words, action is applied to both slide bases so as to simultaneously pull both of them and, after all, both slide bases move to the forward side equally in parallel as the moving body 2 without generating the positional shift of the whole.

Bridge-shaped moving apparatus

PROBLEM TO BE SOLVED: To provide a balance measurement device that makes a balance measurement with high precision even for a compact rotor whose axial length is short.SOLUTION: A bearing portion 2 which supports a rotary shaft 11 of a rotor 1 whose balance is to be measured rotatably on both sides is a fluid bearing which jets gas, and the fluid bearing itself serves as a head structure of an electrostatic capacity sensor 20. Namely, the fluid bearing 2 comprises a conductive probe A21a serving as a negative electrode of the sensor 20 and a conductive probe B21b serving as a positive electrode of the sensor, a first insulator 22 insulating between the probes A and B, a fitting member 24 for fitting the bearing portion to a bearing holding portion 3, and a second insulator 23 insulating between the probes A, B and the fitting member, those being united by bonding etc. Consequently, a gap (g) between the rotary shaft and the bearing portion (probes) is electrically detected as electrostatic capacity.

Balance measurement device for rotor

PURPOSE:To realize the precise alignment of a mask and a wafer. CONSTITUTION:A laser beam L outputted from a laser light source 10 is scanned by a polygon lens 12, and divided into laser lights by a division prism 35. Each of the laser lights passes a half mirror 14, an objective 15 and a standard mask 15, and enters one reflecting mirror 31a of a trapezoidal mirror 31. The light travels while repeating reflections of a concave mirror 32, a convex mirror 33, the concave mirror 32, and the other reflecting mirror 31b of the trapezoidal mirror 31, and reaches a standard wafer 18. The laser beam L which contains the information of a standard mask 16 and the standard wafer 18 returns to the original optical path, and outputted to a photoelectric transducer 20 by the half mirror 14. On the basis of the alignment information obtained by the photoelectric transducer 20, the inclination of scanning direction for a transfer optical system is obtained.

Scanning type aligner

PURPOSE:To perform an easy correction of a travelling table to a high-precise degree of straight, by a method wherein a set value coincides with a displacement through adjustment of a fluid pressure fed to side static pressure fluid bearings mounted in a plural number of spots at both sides of the travelling direction of the travelling table. CONSTITUTION:Two measuring reference blocks 12a and 12b are mounted at one side of a Y-direction, being perpendicular to an X-direction of a travelling table 2 and at a distance in the X-direction. A displacement meter 12a is situated facing and opposite to the measuring reference block 12a and in the proximity of a bearing 6a of two side air bearings 6a and 6b, and a displacement meter 13b is located facing and opposite to the measuring reference block 12b and in the proximity of a side air bearing 6c of side air bearings 6c and 6d. In the two displacement meters 13a and 13b, for example, an electrostatic capacity type non-contact minute displacement meter is employed to detect a minute displacement of an object as a change in electrostatic capacity, and this permits the measurement of a minute displacement of 0.1mum or less.

Funatsu Riyuuichi

Papers

Correcting device for degree of straight of straight travelling table