H
Hanming Wu
Publications - 2
Citations - 156
Hanming Wu is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Plasma etching. The author has an hindex of 2, co-authored 2 publications receiving 156 citations.
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Patent
Pulsed plasma etching method and apparatus
TL;DR: In this paper, a reaction chamber is used to contain an etching gas, and an RF power source is adapted to output RF power for excitation of the gas to generate plasma.
Patent
Plasma etching method and device
TL;DR: In this article, a plasma etching method and device consisting of a reaction chamber, a wafer holder, a first radio frequency power source, a loop winding, a second radiofrequency power source and a pulse control circuit is presented.