H
Hayakawa Yoshinobu
Publications - 1
Citations - 65
Hayakawa Yoshinobu is an academic researcher. The author has contributed to research in topics: Plasma processing & RF power amplifier. The author has an hindex of 1, co-authored 1 publications receiving 65 citations.
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Patent
Plasma processing device
Taichi Hirano,Yoshida Ken,Sasaki Hikoichiro,Yamada Satoshi,Hayakawa Yoshinobu,Ishibashi Junji,Kumagai Fumitoshi +6 more
TL;DR: In this article, the authors proposed an improved way of pulse modulation by which RF power utilized in plasma processing is switched alternately between a high level and a low level depending on the duty ratio of the modulated pulse.