PURPOSE:To measure the three-dimensional information of constituents and/or functions of a specimen containing a light-scattering medium by laser beams CONSTITUTION:Laser beams a1 with a certain frequency which are discharged from a laser light source 1 are formed in conical beams by a lens 3 and are applied to a specimen 2 The specimen 2 is displaced so that the laser beams in conical shape scan the specimen 2 in helical winding spiral shape and then irradiation laser beams are focused by a lens 6 so that the transmission light out of laser beams which are irradiated from the specimen 2 may pass a pin hole P of a screen 7 The two-dimensional intensity distribution of laser beams passing through the pin hole P is detected by a two-dimensional parallel operation type image sensor 8 and is stored by a calculation processing means 12 An operation which is the same as the above is performed to laser beams a11 of other frequencies, thus calculating the difference between the obtained two two-dimensional intensity distributions and obtaining the three-dimensional information of the constituents and/or functions of the specimen using the CT method using a measurement means 9

Three-dimensional information measuring method and device for specimen

[Problem] To suppress effectively a so-called tilting phenomenon so as to improve production efficiency and reduce production costs. [Solution] In this capacitively coupled plasma etching device, an electro-magnet (32) is disposed in the upper portion of an upper electrode (26). The electro-magnet (32) has a core member (34) and coils (36, 38, 40, 42). The core member (34) has a structure wherein a pillar-shaped portion (44), a plurality of cylinder portions (46,48,50,52) and a back plate portion (54) are integrated. Under the control of a control unit (60), an electro-magnet drive circuit (56) is capable not only of selectively energizing any one of the coils (36, 38, 40, 42) with an arbitrary excitation current, but also of energizing an arbitrary combination of a plurality of the coils simultaneously with a common excitation current or separate arbitrary excitation currents.

Plasma processing device and plasma processing method

A magnetic field generator includes a top yoke having an opening, a back yoke fixed to the top yoke, a center yoke fixed to the back yoke in such a manner as to face to the opening of the top yoke, and a coil wound around the center yoke. The opening has a straight-line shaped central portion with its gap kept constant, and both end portions with their gaps becoming larger as going outwardly from the vicinities of both end portions of the center yoke.

Magnetic field generator and magneto-optical storage device using the same

PURPOSE:To keep a gap between a disk and a magnetic field generating coil part constant by providing a first permanent magnet at the outer periphery of optical magnetism, providing additionally a second permanent magnet with polarity having repulsion confronting with the first permanent magnet, and supporting a terminal part where no second permanent magnet is provided additionally rotatably freely. CONSTITUTION:The repulsion between the first permanent magnet 4 and the second permanent magnet 10 occurs since they are arranged so as to confront their same polarity with each other. The magnitude of the magnetomotive forces of the magnets 4 and 10 are set to keep the gap between a magneto- optical disk 3 and a magnetic core 3 to be almost kept at a constant value d1. Even when camber exists in the disk 3, a distance d2 between the magnets 4 and 10 can be almost kept constant, therefore, the gap between the disk 3 and the core 3 can be kept at the constant value d1.

Hayashi Masamichi

Papers

Magneto-optical recorder