An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

The present invention provides a heterocyclic compound and an organic light-emitting device including the heterocyclic compound. The organic light-emitting devices using the heterocyclic compounds have high-efficiency, low driving voltage, high luminance and long lifespan.

Organic light-emitting device

An object of the present invention is to decrease the resistance of a power supply line, to suppress a voltage drop in the power supply line, and to prevent defective display. A connection terminal portion includes a plurality of connection terminals. The plurality of connection terminals is provided with a plurality of connection pads which is part of the connection terminal. The plurality of connection pads includes a first connection pad and a second connection pad having a line width different from that of the first connection pad. Pitches between the plurality of connection pads are equal to each other.

Semiconductor device and display device

An organic light emitting display apparatus that has high (or improved) contrast and/or impact resistance. The organic light emitting display apparatus includes: a substrate; an organic light emitting device on the substrate to display an image; a sealing member on the organic light emitting device; a semitransparent film on a surface of the sealing member facing away from the organic light emitting device to transmit a portion of external light and to reflect another portion of the external light; a passivation film on the semitransparent film to protect the semitransparent film; and a transmissive black layer between the sealing member and the organic light emitting device to increase contrast, wherein the semitransparent film has a refractive index greater than that of the passivation film.

Organic light emitting display apparatus

Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.

Substrate Processing Apparatus

An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing plural kinds of works, a carriage system for carrying plural kinds of works, and a transfer system for delivering works between the carriage system and a processing station. A method for carrying a variety of products is realized in which the carriage system simultaneously carries plural kinds of works between the plurality of processing stations and stops at a predetermined position of the transfer system, whereas the transfer system identifies and delivers the desired kind of work to and from the carriage system.

Method and apparatus for carrying a variety of products

In a chip carrier wherein a semiconductor chip is face down bonded to a package substrate through solder bumps, then covered with a cap and sealed hermetically using a sealing solder, the back of the semiconductor chip being bonded closely to the underside of the cap using a solder for heat transfer, a solder preform serving as the said heat transfer solder is heat-melted and a portion of the thus melted solder is allowed to flow into the sealing portion to effect the hermetic seal of the chip. Furthermore, in order to improve the flowability of the solder preform during the melt flow thereof, a metallized layer for heat transfer formed under the heat transfer solder of the cap and a sealing metallized layer are partially connected with each other through a connecting metallized layer.

Semiconductor integrated circuit device and method of fabricating same

A self-propelled vehicle capable of all directional movement over a floor surface and adapted to be guided along a path such as a semiconductor processing line. The vehicle is provided with at least three wheels having a construction enabling rotational movement in a rotational plane of the wheel and in a direction orthogonal thereto. When at least four wheels are provided, the vehicle is provided with a suspension mechanism for mounting the wheels and a mechanism for maintaining a parallel relationship of the suspension mechanism and a chassis of the vehicle so that slanting of the vehicle body during travel is avoided. Also, the vehicle is provided with a vibration preventing base interposed between the vehicle and a substance mounting base for controlling the proper vibration frequency of the vibration presenting base to be lower than 1/√2 of the proper vibration frequency of the vehicle.

Self-propelled vehicle

Provided is an organic EL display device in which a large amount of a moisture absorbent is formed in a limited narrow region. An organic electroluminescence display device includes a rectangle element substrate having a display region; and a sealing substrate firmly adhered to the element substrate at a protrusion formed on the periphery thereof, in which a moisture absorbent is formed in a region of a concave surface surrounded by the protrusion so as not to overlap the display region, and the moisture absorbent includes moisture absorbents which are formed of a plurality of linear pattern set each joined to adjacent another moisture absorbents so as to be disposed in parallel with each other, and the crosssections of the moisture absorbents intersecting the longitudinal direction of the moisture absorbents are formed in the shape of a plurality of mounds joined to each other.

Organic electroluminescence display device

PURPOSE:To obtain a photosensitive resin compsn having high resolution and ensuring superior work efficiency by using a prepolymer of an unsatd compd, a monomer of a multifunctional unsatd compd, a radical photopolymn initiator, epoxy resin and a cationic photopolymn initiator as essential components CONSTITUTION:This photosensitive resin compsn contains 100ptswt prepolymer of an unsatd compd such as diallyl phthalate, 1-50ptswt monomer of a multifunctional unsatd compd having >=2 ethylene bonds in the molecule, 05-20 ptswt radical photopolymn initiator, 5-30ptswt epoxy resin and 1-10ptswt cationic photopolymn initiator based on 100ptswt epoxy resin The diallyl phthalate prepolymer is also called beta-polymer and is solid in an ordinary state The pref mol wt of the prepolymer is 3,000-30,000 because satisfactory developability is obtd This photosensitive resin compsn solidifies well at the time of exposure and can be developed with a chlorine-contg solvent A body hardened by exposure has improved heat resistance and insulation resistance

Hiroshi Kikuchi

Papers

Method and apparatus for carrying a variety of products

Semiconductor integrated circuit device and method of fabricating same

Self-propelled vehicle

Organic electroluminescence display device

Photosensitive resin composition