H
Hiroshi Matsumoto
Publications - 1
Citations - 2
Hiroshi Matsumoto is an academic researcher. The author has contributed to research in topics: Proximity effect (electron beam lithography) & Modulation. The author has an hindex of 1, co-authored 1 publications receiving 2 citations.
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Patent
Charged particle beam writing apparatus and method utilizing a sum of the weighted area density of each figure pattern
Yasuo Kato,Hiroshi Matsumoto +1 more
TL;DR: In this article, a charged particle beam writing apparatus includes an area density calculation unit to calculate a pattern area density weighted using a dose modulation value, which has previously been input from an outside and in which an amount of correction of a dimension variation due to a proximity effect has been included.