Showing papers by "Hisato Koshiba published in 2009"
Patent•
23 Jul 2009
TL;DR: In this article, the authors proposed a method for producing a deposited film by which heat radiation effect particularly upon physical vapor deposition is enhanced and a vapor deposition film can be suitably deposited on a resin sheet.
Abstract: PROBLEM TO BE SOLVED: To provide a method for producing a deposited film by which heat radiation effect particularly upon physical vapor deposition is enhanced and a vapor deposition film can be suitably deposited on a resin sheet. SOLUTION: While a heat radiation sheet 20 is tightly stuck to a space between a base 8 and a resin sheet 9 within a vacuum chamber 12 of an RF magnetron sputtering apparatus 1, a vapor deposited film 11 is deposited on the resin sheet 9. Thereby, heat radiation effect to the resin sheet 9 can be enhanced, a fault in which the resin sheet 9 is dissolved can be suppressed compared with the conventional case, and the vapor deposited film 11 having desired characteristics can be deposited on the resin sheet 9. COPYRIGHT: (C)2009,JPO&INPIT
2 citations