H
Ho W. Lo
Researcher at Electro Scientific Industries, Inc.
Publications - 2
Citations - 248
Ho W. Lo is an academic researcher from Electro Scientific Industries, Inc.. The author has contributed to research in topics: Surface micromachining & Laser. The author has an hindex of 2, co-authored 2 publications receiving 248 citations.
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Patent
Laser system and method for single press micromachining of multilayer workpieces
TL;DR: In this paper, a single pass actuator, such as a deformable mirror, quickly changes the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output at the workpiece surface between at least two different fluence levels.
Patent
Laser system and method for single pass micromachining of multilayer workpieces
TL;DR: In this paper, a single pass actuator, such as a deformable mirror, quickly changes the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output at the workpiece surface between at least two different fluence levels to facilitate processing top metallic layers.