H
Huajie Chen
Researcher at Murphy Oil
Publications - 1
Citations - 85
Huajie Chen is an academic researcher from Murphy Oil. The author has contributed to research in topics: Etching (microfabrication) & Epitaxy. The author has an hindex of 1, co-authored 1 publications receiving 85 citations.
Papers
More filters
Patent
Method of preventing surface roughening during hydrogen pre-bake of SiGe substrates using chlorine containing gases
TL;DR: In this article, an epitaxial silicon-containing layer was formed on a silicon germanium, patterned strained silicon, or patterned thin silicon-on-insulator surface.