A reduced-pressure processing apparatus which comprises a wafer table, two processing chambers, and three load-locking chambers. The wafer table temporarily supports a workpiece. In the first processing chamber, a first process is performed on a workpiece under a reduced pressure, In the second processing chamber, a second process is performed on the workpiece under a reduced pressure. The first load-locking chamber is connected to the first processing chamber, for allowing to be pneumatically disconnected from the first processing chamber, and allowing a passage of a workpiece into and from the first processing chamber and to and from the temporary holding means. The second load-locking chamber is connected to the second processing chamber, for allowing to be pneumatically disconnected from the second processing chamber, and allowing a passage of a workpiece into and from the second processing chamber and to and from the temporary supporting means. The third load-locking chamber is located between the first and second processing chambers and connected thereto, for allowing to be pneumatically disconnected from the first and second processing chambers, and allowing a passage of a workpiece into and from the first and second processing chambers and to and from the temporary holding means.

Reduced-pressure processing apparatus

A power converter for supplying an AC load with a sum of an output voltage of multiplexed PWM inverters each having an output transformer, and an output voltage from a direct-connection PWM inverter having no output transformer. One or a plurality of PWM inverters constituting the multiplexed PWM inverters comprise a circuit for controlling primary or exciting currents of corresponding output transformers connected thereto, and the direct-connection PWM inverter comprises a circuit for controlling a current to be supplied to the AC load.

Variable-voltage and variable-frequency power converter

A shield wire comprising: a conductor, an insulation layer provided around an outer periphery of the conductor; an electrically-conductive resin layer provided around an outer periphery of the insulation layer; a covering insulation layer formed around an outer periphery of the electrically-conductive resin layer; and shield device for shielding the shield cable from electromagnetic interference, the means formed to electrically contact the electrically-conductive resin layer.

Electromagnetic wave fault prevention cable

A semiconductor laser controller converts the light output of the driven laser to a photovoltaic current proportional to that light output and separates the current into high and low frequency components. A negative feedback loop controls the forward current of the laser such that the sum of these high and low frequency components of the photovoltaic current equal a reference signal current defining the light output of the laser. A control unit controls the reference current such that a voltage proportional to the low frequency component of the photovoltaic current equals a reference voltage corresponding to the reference current.

Semiconductor laser controller

A liquid jet recording head comprising a first substrate (100) provided with an energy-generating element that generates an energy for discharging a recording liquid, a second substrate (400) jointed to the first substrate, the second substrate having grooves (411,412) that form passages for the recording liquid in accordance to the position of the energy-generating element at the jointing and being integrated with a discharge port-forming member that forming discharge ports (421,422) for the recording liquid on the front side of the grooves, and a force-endowing (500) member that tightly boxes the first and second substrates to each other by a mechanically endowed force has a high reliability and can be produced in a high productivity at a low cost with a smaller number of production steps.

Liquid jet recorder

PURPOSE:To stabilize the output level of a TV signal, by applying a photoelectric conversion to an optical TV signal which is negatively modulated when this signal is received to detect the clamping level, and then performing a gain control to fix the clamping level. CONSTITUTION:A received optical TV signal (a) is converted into an electric signal by an avalanche photodiode APD1. An inverted waveform (c) at an output point A of preamplifier 2 and applied to a clamping level detecting part 3 and an output amplifying part 4. The part 3 defines a synchronizing signal level, for example, as a clamping level and detects this level to hole it until the next synchronizing signal. This detected signal is compared with the reference voltage Vr through an expanding amplifier 5. Then the base of a transistor TRQ1 of a bias control part is controlled to control the bias of the APD1, and the amplification factor is controlled so as to secure a fixed clamping level. The part 3 detects V'C and controls the bias voltage although the peak levelreaches P2. As a result, the potential at the point A forms a curve (c) to the TV signal of a curve (b).

Automatic gain controller

PURPOSE:To always obtain a predetermined optical output of a laser diode even if an environmental temperature is varied by detecting the peak value of the optical output of the diode, applying it to pulse width varying means, simultaneously detecting the mean value of the optical outputs, and applying it to a laser diode driving circuit. CONSTITUTION:The peak value of the optical output obtained by a peak detector 70 is applied to one input terminal of an operational amplifier 80, a pulse width control voltage Vpcont is set to the other input terminal, and the differential voltage of both is input as a Vcomp to the base of a Tr32. On the other hand, the mean value of the optical outputs obtained by a mean value detector 71 is applied to one input terminal of an operational amplifier 81, a mean control voltage Vacont is set to the other input terminal, the differential voltage of both is input, as Vave, to the base of a Tr50, and the peak current of the optical output of the LD10 is controlled. Assume now that the environmental temperature is varied, for example, to a higher temperature side, an optical output having a narrow pulse width and a large peak value is obtained, and it is so controlled by the control voltage input to the Tr50 that the mean value of the optical outputs becomes constant, thereby obtaining a predetermined optical output pulse with the peak value pulse width.

Laser diode optical output control circuit

PURPOSE:To perform gain adjustment of an O/E optical power, by switching a gain adjusting path preset to a corresponding photoelectric conversion section (O/E) simultaneously with the switching of an input switch, through the system transmitting a combined signal of input and output transmission lines to an optical switch and the O/E section at the same time. CONSTITUTION:Cameras 1a-1d transmit caught information to an electrooptic conversion sections E/O1-E/O4 in an electric signal, where the signal is converted into an optical signal. The optical signal is transmitted to an optical switch 11 of a reception sensor 9 via transmission lines 7a-7d. The optical switch 11 connects the transmission line to an output transmission line 13 through the switching operation and introduces the signal to an photoelectric conversion section O/E 17 via the transmission line 13 and a photodetector 15. The O/E 17 converts light into electric signals and transmits the signals to a television 21. A keyboard 23 transmits an instruction signal of the combination of the output transmission line 13 and the input transmission lines 7a-7d, and when a key is depressed, an instruction signal is transmitted to a controller 25.

Automatic gain adjusting system for optical switch system

PURPOSE:To compensate the distortion based on a change in the lighting efficiency depending on the LED frequency by providing the proper number of serial or parallel resonance circuits to the load of a drive current amplifier. CONSTITUTION:Resonance circuits T1-Tn are provided in parallel between amplification transistors (TRs) TR1 and TR2. The output of the TR2 lights an LED via a TR3. In this case, the serial resonance circuit T1 decreases the load resistance of the TR1 substantially to lower the level of the output signal, and the parallel resonance circuit T2 increases the load of the TR1 substantially to increase the output signal thereby compensating the reduction in the lighting efficiency of the LED.

Distortion compensation circuit in light emitting diode driving device

PURPOSE:To suppress the fluctuation of a voltage dividing ratio of an input and an output high frequency voltage by providing a means applying a prescribed DC voltage across an FET connected in series with a resistor and a means making a DC voltage across the FET constant even if the temperature is changed. CONSTITUTION:The input high frequency voltage from a high frequency power supply 9 passes through a DC cut-off capacitor C1 and is amplified by an amplifier 4. Its output is divided into a ratio of a resistor R5 of a voltage dividing ratio variable circuit and a resistance of drain-source of the FET6 and ampified by the amplifier 8 having a high input impedance through the DC cut-off capacitor C4. An amplified (5) DC voltage V4 and a voltage at an output point of the amplifier 4 are controlled as so as to be identical to each other by a feedback integration amplifier comprising the amplifier 5, a resistor R6 and a capacitor C2. Further, a feedback integration amplifier comprising an amplifier 7, a resistor R8 and a capacitor C3 keeps a DC voltage V5 inputted to the amplifier 7 and a voltage of drain-source of the FET6 identical.

Ichikawa Akihiko

Papers

Automatic gain controller

Laser diode optical output control circuit

Automatic gain adjusting system for optical switch system

Distortion compensation circuit in light emitting diode driving device

Voltage dividing ratio variable system