An immersion lithography apparatus includes an optical member, a gap defined between the optical member and a surface disposed opposite the optical member being filled with an immersion liquid, and a fluid control device including a gas outlet through which a gas is supplied to prevent the immersion liquid from entering a surround area external to an exposure area. A flow velocity of the gas supplied from the gas outlet depends on a contact angle between the immersion liquid and the surface.

Immersion lithography fluid control system

An object of the invention is to provide an exhaust emission control device which eliminates the use of a heat-retention structure using heat-insulating material such as glass wool so as to attain substantial lessening in production cost. A discharge end of a gas gathering chamber is connected to an entry end of a mixing pipe so as to encase the entry end of the mixing pipe and close an opened end face in a required spaced-apart relationship. Moreover, a side surface of the entry end of the mixing pipe adjacent to the discharge side of the particulate filter is formed with an opening; and gas guide passages are formed in the gas gathering chamber by guide fins for tangential introduction of all of the exhaust gas from the discharge side of the particulate filter to the opening. An extra space isolated from the gas guide passages is ensured in the gas gathering chamber as a heat-retention chamber surrounding the entry end of the mixing pipe.

Exhaust emission control device

Methods for calibrating and making measurements using fiber optic sensors are disclosed using backscattered wavelengths and independent sensors The disclosure sets outs methods applicable with fiber optic sensors either in a deployed in a loop and in a linear configuration and useful for measurements including temperature

Method for measuring and calibrating measurements using optical fiber distributed sensor

A temperature distribution measuring apparatus, which inputs pulsed-light into an optical fiber, measures backward Raman-scattered light generated in the optical fiber, and calculates a temperature distribution along the optical fiber in accordance with the ratio of the intensity of anti-Stokes' light to the intensity of Stokes' light of the backward Raman-scattered light. The apparatus comprises an optical filter for extracting the anti-Stokes' light and Stokes' light from the backward Raman-scattered light, an optical attenuator for attenuating the Stokes' light extracted by the optical filter, an optical switch for receiving the anti-Stokes' light extracted by the optical filter and the Stokes' light output from the optical attenuator, and selectively outputting one of the anti-Stokes' flight and Stokes' light, a light-receiving element for detecting the intensity of the light output from the optical switch, an amplifier for amplifying an analog electrical signal produced by the light-receiving element, an amplified analog-to-digital converter for converting the analog electrical signal into a digital signal, and a signal processor for measuring the temperature distribution along the optical fiber by processing the digital signal.

Temperature distribution measuring apparatus using an optical fiber

An epicyclic gear carrier assembly for use in an epicyclic gear train of a gas turbine engine, the epicyclic gear train (12) having a central axis and a plurality of epicyclic gears (18) rotatable about individual gear axes (34). The epicyclic gear carrier assembly (24) comprises at least a carrier plate (26) defining a plurality of circumferentially spaced axle bores (32) which are disposed radially outward from the central axis and are co-axial with the individual gear axes (34). A plurality of corresponding gear axles (34) are disposed within the axle bores (32), and the plurality of epicyclic gears (18) are rotatably mounted to the gear axles (34) via bearing elements (36). An epicyclic carrier member (40) comprises a plurality of axle engaging elements (54) that are co-axial with the gear axles (34) and are engaged thereto by load transmission members such that load is transferred from the gear axles (34) to the epicyclic carrier member (40).

Compact epicyclic gear carrier

An optical fiber is installed to pass through a plurality of measurement places. Predetermined positions in the optical fiber are set at a predetermined temperature. When an optical signal is radiated on the optical fiber, Raman scattering occurs at various portions of the optical fiber. The intensities of the Raman scattered light components depend on temperatures. Backscattered light components of the Raman scattered light are sampled and stored in a memory. A temperature distribution on the optical fiber is obtained on the basis of the stored data. The temperatures of the mesurement places can be specified on the basis of the predetermined temperature on the obtained temperature distribution as a reference. The temperatures of the measurement places can be corrected on the basis of the predetermined temperature.

Apparatus and method for measuring temperatures by using optical fiber

An electromagnetic flowmeter has first and second magnetic field generating units. The first magnetic field generating unit applies a first magnetic field having a square wave of 4 to 8 Hz to a fluid to be measured. The second magnetic field generating unit applies a second magnetic field having a square wave of 25 to 35 Hz independently of the first magnetic field. A first electromotive force signal induced by the first magnetic field and a second electromotive force signal induced by the second magnetic field are detected by electrodes. A determination circuit determines whether the first electromotive force signal is normal and outputs a determination result. A first signal processing circuit generates a first flow rate signal on the basis of the first electromotive force signal. A second signal processing circuit generates a second flow rate signal on the basis of the second electromotive force signal. A calibration circuit outputs one of the first flow rate signal and the second flow rate signal calibrated by the first flow rate signal as a signal representing a flow rate of the fluid when the determination result represents a normal state, and outputs one of the second flow rate signal and the first flow rate signal calibrated by the second flow rate signal as a signal representing the flow rate when the determination result represents an abnormal state.

Electromagnetic flowmeter utilizing magnetic fields of a plurality of frequencies

An electromagnetic flowmeter characterized by comprising a measuring tube through which fluid flows, a pair of electrodes installed to a wall surface of the measuring tube so as to face each other, electrode mounting holes of a funnel shape made at a specified angle in an inside wall surface where the electrodes are installed so as to face each other, packing that has a tilt angle different from that of the funnel-shaped portion of the electrode mounting hole and that has a penetration in its center which allows an insertion of the electrode, an elastic member installed to one end of the electrode for pulling the electrode in a longitudinal direction with a particular force and giving & particular elasticity to the electrode, and a fastening member for fastening the electrode to the measuring tube with a screw via the packing.

Measuring tube for use with electromagnetic flowmeter

A flow rate measuring apparatus includes a measuring pipe in which a fluid to be measured flows, a flowmeter for measuring a flow rate of the fluid to be measured flowing in the measuring pipe, and a cleaning flow generator for removing an adhesive substance in the measuring pipe by using the fluid to be measured, thereby correctly performing flow rate measurement by the measuring pipe. When the flowmeter is an electromagnetic flowmeter, the cleaning flow generator prevents the adhesive substance from resistively connecting electrodes for induced electromotive force detection. When the flowmeter is an ultrasonic flowmeter, the cleaning flow generator prevents the adhesive substance from interfering with transmission of an ultrasonic wave in the measuring pipe. The cleaning flow generator removes the adhesive substance by performing at least one of injecting the fluid to be measured into the measuring pipe, narrowing a flow path of the fluid to be measured to increase a flow rate of the fluid to be measured in the measuring pipe, inflating a balloon in the measuring pipe, injecting a cleaning agent in the measuring pipe, turning the fluid to be measured, and charging a high-pressure gas into the flow path of the fluid to be measured.

Ichiro Wada

Papers

Apparatus and method for measuring temperatures by using optical fiber

Electromagnetic flowmeter utilizing magnetic fields of a plurality of frequencies

Measuring tube for use with electromagnetic flowmeter

Flow rate measuring apparatus

Verfahren zum befestigen eines werkstuecks in einem keramikgegenstand und nach dem verfahren hergestellter werkstueckhaltiger keramikgegenstand