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Ijaz Jafri
Researcher at Honeywell
Publications - 40
Citations - 1038
Ijaz Jafri is an academic researcher from Honeywell. The author has contributed to research in topics: Wafer & Supercritical fluid. The author has an hindex of 14, co-authored 38 publications receiving 1010 citations. Previous affiliations of Ijaz Jafri include Wilmington University & Stony Brook University.
Papers
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Patent
Supercritical fluid delivery and recovery system for semiconductor wafer processing
TL;DR: In this article, a continuous flow, steady state fluid delivery and recovery system for a process chamber and processes requiring supercritical fluid and desired additives including co-solvents, for conducting repetitive batch processing operations in an automated environment is presented.
Patent
Supercritical phase wafer drying/cleaning system
TL;DR: In this paper, an apparatus and a method for drying a microelectronic structure on wafer substrate using supercritical phase gas techniques and a unique pressure vessel locking mechanism is described.
Patent
Supercritical fluid drying system
TL;DR: In this article, a method and apparatus for fabricating and drying wafers, including microelectronics mechanical systems (MEMS) structures, in a second supercritical processing fluid environment is presented.
Patent
Method of manufacturing vibrating micromechanical structures
TL;DR: In this article, a method for fabrication of single crystal silicon micromechanical resonators using a two-wafer process, including either a Silicon-on-insulator (SOI) or insulating base and resonator wafers, was proposed.
Patent
Supercritical fluid cleaning process for precision surfaces
Mohan Chandra,David J. Mount,Michael Costantini,Heiko Moritz,Ijaz Jafri,Jim Boyd,Rick M. Heathwaite +6 more
TL;DR: In this paper, a dry process for the cleaning of precision surfaces such as of semiconductor wafers, by using process materials such as carbon dioxide and useful additives such as cosolvents and surfactants, where the process materials are applied exclusively in gaseous and supercritical states.