J
Jiong-Ping Lu
Researcher at Texas Instruments
Publications - 1
Citations - 200
Jiong-Ping Lu is an academic researcher from Texas Instruments. The author has contributed to research in topics: Sputtering & Layer (electronics). The author has an hindex of 1, co-authored 1 publications receiving 200 citations.
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Patent
Process for fabricating conformal Ti-Si-N and Ti-B-N based barrier films with low defect density
TL;DR: In this article, the authors proposed a CVD process for Ti-Si-N or Ti-B-N films, where a single feed gas (preferably TDMAT) serves as the source for titanium and nitrogen, and another feed gas is used as a source for silicon or boron.