J
John D. Wallace
Publications - 1
Citations - 14
John D. Wallace is an academic researcher. The author has contributed to research in topics: Projector & Substrate (printing). The author has an hindex of 1, co-authored 1 publications receiving 14 citations.
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Non-contact edge detector
TL;DR: In this article, a non-contact substrate alignment system for a lithography system is disclosed that comprises three substrate edge detectors, each edge detector comprises a projector, preferably located above the substrate, that projects a light field down onto a substrate and a stage.