J
John Shugrue
Researcher at ASM International
Publications - 9
Citations - 579
John Shugrue is an academic researcher from ASM International. The author has contributed to research in topics: Substrate (printing) & Diaphragm valve. The author has an hindex of 6, co-authored 9 publications receiving 579 citations.
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Patent
Apparatus and method for calculating a wafer position in a processing chamber under process conditions
David Marquardt,John Shugrue +1 more
TL;DR: An apparatus for processing a wafer including a reaction chamber having a reaction space for processing the wafer, a susceptor positioned within the reaction chamber and having a sidewall as mentioned in this paper.
Patent
Lockout tagout for semiconductor vacuum valve
John Shugrue,Ron Moen +1 more
TL;DR: In this article, the authors present a device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rods.
Patent
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
TL;DR: In this paper, the authors describe susceptor assemblies as two or more sections that can be moved relative to each other to allow rapid changes in a substrate temperature, which can be used to manipulate conductance of gas flow though a reactor.
Patent
Variable conductance gas distribution apparatus and method
TL;DR: The variable conductance gas distribution systems allow rapid manipulation of gas-flow conductance through the gas distribution system as mentioned in this paper, and they allow rapid control of gas flow conductance in the distribution system.
Patent
Diaphragm valves, valve components, and methods for forming valve components
TL;DR: In this paper, a diaphragm valve may include, a valve body comprising a valve channel, the valve channel including an inlet channel and an outlet channel, and a valve actuator that is operable to operable.