J
Jui-Tsen Huang
Researcher at United Microelectronics Corporation
Publications - 2
Citations - 109
Jui-Tsen Huang is an academic researcher from United Microelectronics Corporation. The author has contributed to research in topics: Optical proximity correction & Polygon. The author has an hindex of 2, co-authored 2 publications receiving 109 citations.
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Patent
Optical proximity correction method
TL;DR: In this paper, a plurality of dummy patterns are formed to surround the isolated figure, so as to reduce the difference in pattern density of the integrated circuit layout, and a transmitted light of the dummy patterns provides a phase difference of 0 or 180 degrees relative to a transmission light of an integrated circuit.
Patent
Correcting the polygon feature pattern with an optical proximity correction method
TL;DR: In this paper, a method to use a pattern section without extra serif to correct the polygon feature pattern with at least one inner corner is provided, which can achieve effective OPC without adding any extra data point.