K
K. G. Haens
Publications - 1
Citations - 2
K. G. Haens is an academic researcher. The author has contributed to research in topics: Software & Mask inspection. The author has an hindex of 1, co-authored 1 publications receiving 2 citations.
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DFM software for photomask production and qualification of its accuracy and functionality
TL;DR: An automatic system that combines actions in both the image domain as well as in the layout database domain for accurate mask-defect analysis and application of design criticality is presented in this paper.