Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.

Substrate Processing Apparatus

Co‐Al2O3 composite films were produced by electron‐beam coevaporation in a system with elaborate process control. The deposits were analyzed by transmission electron microscopy, electron diffraction, Auger electron spectroscopy, secondary ion mass spectroscopy, Rutherford backscattering, field ion microscopy, mechanical stylus measurements, and electrical dc and ac measurements. A uniform separated‐grain structure with regular hcp Co particles embedded in Al2O3 was found for Co contents (fCos’) up to ∼30 vol %. The complex dielectric permeability e was evaluated in the 0.3≲λ≲40‐μm wavelength range for samples with 0.11≲ fCo ≲0.60 by carefully selected combinations of spectrophotometric transmittance and reflectance data. Numerical accuracy and internal consistency were investigated. Effective medium theories for e were derived by applying classical scattering theory to spherical random unit cells defined so as to properly represent a number of typical microgeometries. The formulations due to Maxwell Garnett, Bruggeman, and others were thus rederived in a unified way. Large‐size limits of validity and extensions to nonspherical particles were treated. It was found that the Maxwell Garnett theory could reproduce the experimental e’s in detail at low fCo provided that some Co was taken to be dispersed in the insulating matrix. At larger fCo’s we found discrepancies which are likely to be due mainly to dipole‐dipole coupling among adjacent particles. A comparison of the experimental e’s and the rigorous Bergman–Milton bounds, which hold irrespective of detailed microgeometry, gave several interesting results: the e’s varied monotonically along one of the bounds for isotropic materials as fCo was increased, at large fCo we found evidence for anisotropy, and at λ≊12.5 μm we noted certain cases of disagreement with even the most generous bounds. The empirical e’s were used to construct surfaces which combine a high solar absorptance as with a low hemispherical thermal emittance eH. From a computer optimization study we found that as =0.95 and eH =0.07 could be obtained with 0.07 μm of Co‐Al2O3 ( fCo≊0.6) antireflected with 0.07 μm of Al2O3 and laid on Ni. These results were verified by measurements on samples which approximate the ideal design.

Optical properties and solar selectivity of coevaporated Co‐Al2O3 composite films

Embodiments related to managing the process feed conditions for a semiconductor process module are provided. In one example, a gas channel plate for a semiconductor process module is provided. The example gas channel plate includes a heat exchange surface including a plurality of heat exchange structures separated from one another by intervening gaps. The example gas channel plate also includes a heat exchange fluid director plate support surface for supporting a heat exchange fluid director plate above the plurality of heat exchange structures so that at least a portion of the plurality of heat exchange structures are spaced from the heat exchange fluid director plate.

Process feed management for semiconductor substrate processing

Matter continuously exchanges energy with its surroundings. This exchange can be dominated by radiation, conduction, or convection. In this brief review we discuss how proper design of radiative surface properties can be used for heating and cooling purposes. The desired properties can be understood once it is realized that solar and terrestrial radiation take place in different wavelength ranges and that only part of the solar spectrum is useful for vision and for photosynthesis in plants. These facts allow the possibility of tailoring the spectral absorptance, emittance, reflectance, and transmittance of a surface to meet different demands in different wavelength intervals, i.e., to take advantage of spectral selectivity. One example is the selective surface for efficient photothermal conversion of solar energy, which has high absorptance over the solar spectrum but low emittance for the longer wavelengths relevant to thermal reradiation. Below we discuss the pertinent spectral radiative properties of our ambience. These data are then used as background to the subsequent sections treating four examples of spectrally selective surfaces. The first example is the previously mentioned selective surface for converting solar radiation to useful heat. The second example considers surfaces capable of reaching low temperatures by benefiting from the spectral emittance of the clear night sky. The third example concerns two related types of transparent heat mirror. The fourth example, finally, treats radiative cooling of green leaves; this part is included since it gives a nice example of how nature solves a difficult problem in an elegant and efficient way. This example hence provides an interesting background to the other cruder types of artificial selective surfaces. Throughout our discussion we treat the ideal spectral properties, give an illustrative experimental example of how well this goal can be realized, and—where this is possible—show a corresponding theoretical curve indicating to what extent the measured results can be theoretically understood.

Radiative heating and cooling with spectrally selective surfaces.

The present invention relates to a process and system for depositing a thin film onto a substrate. One aspect of the invention is depositing a thin film metal oxide layer using atomic layer deposition (ALD).

K. Seshan

Papers

Composition and microstructure of black molybdenum photothermal converter layers deposited by the pyrolytic hydrogen reduction of MoO2Cl2

On the mechanism of growth and the hydrogen reduction of CVD Black Molybdenum thin films