K
Kang Sang Beom
Researcher at Samsung
Publications - 2
Citations - 228
Kang Sang Beom is an academic researcher from Samsung. The author has contributed to research in topics: Ohmic contact & Layer (electronics). The author has an hindex of 2, co-authored 2 publications receiving 228 citations.
Papers
More filters
Patent
Method of and apparatus for forming a metal interconnection in the contact hole of a semiconductor device
Kang Sang Beom,Sang-In Lee +1 more
TL;DR: In this article, a metal interconnection is fabricated in a contact hole of a semiconductor device to reduce the contact resistance and improve the step coverage of the interconnection, and an ALD (atomic layer deposition)-metal barrier layer is formed on the protective layer.
Patent
Method and apparatus for fabricating semiconductor device
Kang Sang Beom,Lee Sang In +1 more
TL;DR: In this paper, a method and an apparatus for fabricating a semiconductor device are provided to prevent a damage of an ohmic contact layer in a process for forming a metal barrier layer.